Abstract:H2O and CH4 play key roles in the process of climate change, then real-time online measurement of H2O and CH4 concentrationshas always been one of the hot issues of domestic and foreign scholars. In this paper, an off-axis cavity enhanced absorption spectroscopy device was established with two high reflectivity mirrors of 99. 997 6% combining a tunable semiconductor laser operating around 1. 653 mu m as the light source, and the high sensitivity measurement of H2O and CH4 was carried out. The effective absorption optical path of the system was calibrated by the absorption area-concentration relationship. The feasibility of the absorption area-concentration relationship was first verified by an optical absorption cell with a known optical path, and it was used to calibrate effective optical path of the cavity enhancement system. The results showed that the effective absorption path of the cavity enhancement system with the base length of 21 cm reached 8 626. 3 m. The linear response calibration test was carried out with 7 groups of CH4 standard gases of different concentrations (0. 2 similar to 1. 4 mu mol . mol(-1) ) when the pressure was 5. 06 kPa , and the fitting relationship curve between the integrated area of CH4 absorption and the concentration was obtained. The stability of the system and the minimum detectable sensitivity were analyzed by Allan variance. The results showed that the optimal average time for detecting CH4 was 100 s, and the minimum detectable concentration limit was 7. 5 mu mol . mol(-1) . The optimal average time for detecting H2O was 200 s, and the minimum detectable concentration limit was 55 mu mol . mol(-1). The data processing method for improving the measurement precision of the system was also analyzed. The results showed that Kalman filtering could greatly improve the measurement precision and reduce the response time of the system compared to the multiple averaging method. Finally, the experimental system of off-axis cavity enhanced absorption spectroscopy device combining with Kalman filtering technology was used to measure the CH 4 and H2O concentration in real atmosphere for two days. The average daily concentration of CH4 was 2. 1 and 2. 08 t mu mol . mol(-1), respectively. The average daily concentration of H2O was 11 515. 6 and 11 628. 6 mu mol . mol(-1) , respectively. It can be seen that the experimental device of off-axis integration cavity can be used for atmospheric CH4 and H2O detection, and the established system can also be used for high-sensitivity CH4 and H2O monitoring in relevant industrial fields.

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