Ultra-sensitive air pressure sensor based on gelatin diaphragm-based Fabry-Peroy interferometers and Vernier effect

Yukun Shu,Chao Jiang,Chuanju Hu,Longfeng Deng,Li Li,Jiawei Gao,Huiling Huang

DOI: https://doi.org/10.1016/j.optcom.2024.130337

IF: 2.4

2024-02-01

Optics Communications

Abstract:We proposed and experimentally demonstrated a gelatin diaphragm-based Fabry-Perot interferometer (FPI) structure ultra-sensitive fiber optic air pressure sensor. The Fabry-Perot (F–P) cavity of the sensing probe FPI 1 is made of gelatin diaphragm, with a thickness of approximately 0.8 μm and the probe length of approximately 136 μm. The air pressure sensitivity of the probe obtained in the experiment is as high as 334 nm/MPa. In order to further improve the sensitivity of the probe, we fabricated an FPI 2 with an air F–P cavity that is approximately the length of the FPI 1 cavity, and then paralleled FPI 2 with FPI 1 to generate a Vernier effect. The average sensitivity of the Vernier probe obtained in the experiment reached −2650 nm/MPa, which magnified the sensitivity of a single FPI 1 by about 7.9 times. The temperature cross-sensitivity is only 3.6 kPa/°C. This proposed air pressure sensor has the advantages of ultra-high sensitivity, simple manufacturing, low cost, good repeatability and stability, and has broad application prospects in high sensitivity pressure and acoustic detection.

optics