Characterization of Sensitivity of Time Domain MEMS Accelerometer

Enfu Li,Jiaying Jian,Fan Yang,Zhiyong Ma,Yongcun Hao,Honglong Chang

DOI: https://doi.org/10.3390/mi15020227

IF: 3.4

2024-02-01

Micromachines

Abstract:This paper characterizes the sensitivity of a time domain MEMS accelerometer. The sensitivity is defined by the increment in the measured time interval per gravitational acceleration. Two sensitivities exist, and they can be enhanced by decreasing the amplitude and frequency. The sensitivity with minor nonlinearity is chosen to evaluate the time domain sensor. The experimental results of the developed accelerometer demonstrate that the sensitivities span from −68.91 μs/g to −124.96 μs/g and the 1σ noises span from 8.59 mg to 6.2 mg (amplitude of 626 nm: −68.91 μs/g and 10.21 mg; amplitude of 455 nm: −94.51 μs/g and 7.76 mg; amplitude of 342 nm: −124.96 μs/g and 6.23 mg), which indicates the bigger the amplitude, the smaller the sensitivity and the bigger the 1σ noise. The adjustable sensitivity provides a theoretical foundation for range self-adaption, and all the results can be extended to other time domain inertial sensors, e.g., a gyroscope or an inclinometer.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied

What problem does this paper attempt to address?

The paper attempts to address the issue of characterizing the sensitivity of time-domain MEMS accelerometers. Specifically, the authors define the sensitivity of time-domain MEMS accelerometers and investigate its nonlinearity and tunability. Through experimental validation, the authors found that sensitivity can be adjusted by changing the vibration amplitude and resonance frequency, and these results can be extended to other time-domain inertial sensors (such as gyroscopes or tilt sensors).

### Main Issues:
1. **Defining Sensitivity**: The sensitivity of time-domain MEMS accelerometers is defined as the change in the measured time interval per unit change in gravitational acceleration.
2. **Studying Nonlinearity**: The nonlinearity characteristics of sensitivity were analyzed, and a sensitivity with smaller nonlinearity was chosen to evaluate the time-domain sensor.
3. **Tunability**: The methods of adjusting sensitivity by changing the vibration amplitude and resonance frequency were studied.

### Experimental Results:
- **Sensitivity Range**: Experimental results show that the sensitivity ranges from −68.91 µs/g to −124.96 µs/g.
- **Noise Level**: The 1 σ noise ranges from 6.2 mg to 10.21 mg, with larger vibration amplitudes resulting in lower sensitivity and higher noise.
- **Tunability Verification**: Sensitivity was successfully adjusted by changing the vibration amplitude, and the effectiveness of this method was verified.

### Conclusion:
- **Theoretical Basis**: The theoretical basis for the sensitivity of time-domain MEMS accelerometers is provided, including the definition, formula, nonlinearity, and tunability principles of sensitivity.
- **Application Prospects**: The research results indicate that time-domain MEMS accelerometers have the capability of adaptive range, allowing flexible adjustment of sensitivity in different application scenarios.
- **Noise and Resolution**: The accuracy of time measurement and the C-V interface circuit are the main factors affecting the noise floor. By improving these aspects, the performance of the sensor can be further enhanced.

Overall, the paper provides important theoretical and technical support for the characterization and adjustment of the sensitivity of time-domain MEMS accelerometers through systematic research and experimental validation.