Nonlinear mechanism of pull-in and snap-through in microbeam due to asymmetric bias voltages

Jianxin Han,Lei Li,Gang Jin,Baizhou Li,Wei Wang,Qichang Zhang

DOI: https://doi.org/10.1007/s11071-020-05883-1

IF: 5.741

2020-08-13

Nonlinear Dynamics

Abstract:Pull-in and snap-through are two representative bifurcation phenomena in electrically actuated microcomponents, based on which various microdevices are designed and applied in many sensing and actuating fields. In this paper, the nonlinear mechanisms of pull-in and snap-through in a two-electrode actuated microbeam due to asymmetric bias voltages are qualitatively identified. With the considerations of midplane stretching of clamped–clamped microbeam and nonlinear electrostatic force, a continuous dynamic equation of motion is introduced after which a generalized one-degree-of-freedom (1-DOF) model derived using the differential quadrature method is deduced. By the application of the singularity theory on the static equation, transient sets are theoretically obtained which separate two-parameter space of cubic stiffness and DC voltage into seven regions. Associated bifurcation diagrams show that initially straight microbeam can exhibit snap-through motion as well as pull-in behavior when loading proper bias voltages on two electrodes. Besides, detailed division on snap-through region is numerically done and the snap-through direction is discussed and then verified. In what follows, primary resonant frequency closely related to the static solution is examined which show various attractive scenarios versus bias voltage ratio. Moreover, the method of multiple scales is utilized to derive the primary resonant response for small vibration estimation. Combined with theoretical and numerical results, dynamic snap-through motion is observed which implies that dynamic saddle-node bifurcation and interwell jumping due to energy enhancement can both increase the possibility of dynamic snap-through. During dynamic snap-through procedure, microbeam may exhibit cross-well transient chaos.

engineering, mechanical,mechanics

What problem does this paper attempt to address?

### Problems Addressed by the Paper

The paper primarily explores the nonlinear pull-in and snap-through mechanisms of a dual-electrode driven microbeam under asymmetric bias voltage. Specifically:

1. **Background and Motivation**:
- Microelectromechanical systems (MEMS) have rapidly developed in fields such as sensing, actuation, and filtering due to their simple structure and wide applications.
- Understanding the static and dynamic characteristics of these microdevices is crucial before designing and optimizing them.

2. **Research Object**:
- The research object is a microbeam driven by two electrodes with an applied asymmetric bias voltage.
- By adjusting the bias voltage on the two electrodes, single-electrode driving mode, dual-symmetric electrode driving mode, and adjustable arching mode can be achieved.

3. **Main Issues**:
- The paper focuses on two typical bifurcation phenomena—pull-in and snap-through, which are often used as design principles in microdevice design.
- Through theoretical analysis of the nonlinear dynamic equations, the static and dynamic mechanisms of the system are explored.

4. **Methodology**:
- A continuous dynamic equation is established, and a simplified single degree of freedom (1-DOF) model is derived using the differential quadrature method (DQM).
- Singularity theory is used to analyze the static equations, obtain the transition set of the parameter space, and plot the corresponding bifurcation diagrams.
- The method of multiple scales is also used to derive the primary resonance response and explore the triggering mechanism of dynamic snap-through.

Through these theoretical and numerical analyses, the paper reveals various complex behaviors that the microbeam may exhibit under asymmetric bias voltage, including dynamic snap-through and instantaneous chaotic phenomena. These findings contribute to a better understanding and design of microelectromechanical systems.