[20 years' experience with Charnley low friction arthroplasty--striving for durability and future prospects].

K. Sawai

1997-12-01

Abstract:

What problem does this paper attempt to address?

Engineering design and manufacturing of a radio frequency plasma driver without Faraday shield for NBI application

Yuming Gu,Jianglong Wei,Yahong Xie,Caichao Jiang,Yuanlai Xie,Chundong Hu

DOI: https://doi.org/10.1016/j.fusengdes.2024.114505

IF: 1.905

2024-05-12

Fusion Engineering and Design

Abstract:A radio frequency (RF) driven ion source is favorable for high-power and long-pulse neutral beam injection (NBI) system. To reduce the damage caused by the isotropic heat and particle fluxes from the plasma, the traditional RF plasma driver of the NBI ion source introduces a Faraday shield (FS) for protection. However, the simulations and experiments show that the FS seriously affects the RF coupling and around 50 % of the input power deposits on the FS. The water-cooled discharge tubes with a double-layer ceramic structure have been developed to avoid using the FS structure. It's expected to improve the RF power transfer efficiency and to promote the development of high-power and long-pulse RF ion source. To verify the feasibility of the double-layer ceramic structure, the paper has carried out the fluid-thermal-structural coupling analysis and the fracture mechanical analysis on two proposed types: the alumina ceramic brazing structure and the silicon nitride ceramic bonding structure. The sample tests and the prototype manufacturing have been completed. Preliminary tests of the plasma discharge on the prototype of the alumina ceramic brazing structure have been launched. A plasma discharge of 30 kW and 20 s have been achieved.

nuclear science & technology
Research and development progress of radio frequency ion source for neutral beam injector at ASIPP

Yahong Xie,Chundong Hu,Jianglong Wei,Yongjian Xu,Caichao Jiang,Yuming Gu,Yuanzhe Zhao,Qinglong Cui,Lizhen Liang,Shiyong Chen,Qi Wang

DOI: https://doi.org/10.1063/1.5128258

2019-11-01

Abstract:Neutral beam injection (NBI) is one of the most effective tools of four auxiliary plasma heating methods for fusion plasma heating and current drive. Now, a next generation fusion device, China Fusion Engineering Test Reactor, is under design, and a large negative NBI is foreseen. In order to demonstrate the key technology and performance of a negative ion source, a negative radio frequency (RF) ion source test facility has been developed since 2017 in the Institute of Plasma Physics, Chinese Academy of Science. A prototype RF ion source with double drivers (having the same structure with an inner diameter of 200 mm) was developed and tested on the test facility to preresearch the key technology of the RF plasma generator. The driver is equipped with a water-cooled Faraday shield to protect the alumina cylinder from the plasma, and the plasma expands into the rectangular expansion chamber. The RF power of 100 kW with a frequency of 1 MHz is transferred to the RF driver by a matching unit. The characteristics of plasma discharge were studied with classical diagnostic tools, such as the Langmuir probe and water flow calorimeter. Based on the plasma performance tests, a high power of 82 kW plasma discharge for a long pulse of 1000 s was achieved. In this paper, the details of the ion source design, characteristics of plasma, and future research plan will be presented.
Critical slowing down near the smectic-A-hexatic-B transition

R. Geer,H. Liu,E. Hobbie,G. Nounesis,Cheng-Cher Huang,J. Goodby

DOI: https://doi.org/10.1051/JPHYS:0198900500200316700

1989-10-01

Abstract:We have performed high-resolution heat-capacity and thermal-conductivity investigations on the same sample in the vicinity of the smectic-A-hexatic-B transition of n-propyl-4'-n-heptyloxybiphenyl-4-carboxylate (370BC). The thermal diffusivity shows a pronounced drop near the transition. This clearly demonstrates and confirms the critical slowing down of the thermal fluctuations observed in the other member of the homologous series. The anomaly is found to be in quantitative agreement with the conventional theory of critical dynamics Nous avons fait des mesures de capacite calorifique et conductivite thermique, avec une grande resolution, sur un echantillon de n-propyl-4'-n-heptyloxybiphenyl-4-carboxylate (37OBC) au voisinage de la transition smectique A-hexatique B. La conductivite thermique a une forte decroissance pres de la transition, ce qui montre clairement et confirme le ralentissement critique des fluctuations thermiques, deja observe sur des echantillons de series homologues. On verifie que l'anomalie est en accord quantitatif avec la theorie classique de la dynamique des phenomenes critiques
The use of the Peltier effect for simple and accurate calibration of thermoelectric devices

K. Kretzschmar,D. Wilkie

DOI: https://doi.org/10.1098/rspb.1975.0095

1975-08-19

Abstract:A method is described whereby absolute values for the Seebeck coefficient, the thermal conductance and the thermal capacity of thermoelectric devices may be obtained without the need to measure temperature differences or heat flows. The only requirement in addition to the device to be calibrated and its usual recording apparatus is a source of d. c. current and some metal blocks of known thermal capacity. A mathematical theory of the method is presented and tested experimentally. The method has been used to calibrate semiconductor thermoelements and muscle thermopiles and it is applicable in principle to many other devices such as calorimeters.
Design optimization of slit aperture Faraday shield for RF ion source in CRAFT NNBI system

Na Wang,Zhimin Liu,Yahong Xie,Jinxin Wang,Jianglong Wei,Yuming Gu,Qinlong Cui,Yuanlai Xie,Chundong Hu

DOI: https://doi.org/10.1016/j.fusengdes.2022.113272

IF: 1.905

2022-10-01

Fusion Engineering and Design

Abstract:The Faraday shield (FS) is a key part of the radio frequency (RF) ion source for high power neutral beam injection system. The RF transfer efficiency and power loss ratio of the driver with two different types of FS are analyzed using a finite element model. These two types of FS are divided into inclined shape slits and Z shape slits, and each slit shape can be subdivided into six types. It is found that the change of the slit shape on the FS has little effect on the RF transfer efficiency and the power loss ratio. For the six drivers with inclined shape FS slit, the difference in RF efficiency between them does not exceed 1%, and the difference in the power loss ratio on the FS does not exceed 1.2%; for the six drivers with Z shape FS slit, the change in the RF efficiency does not exceed 0.3%, and the change in power loss ratio on the FS does not exceed 0.4%. Meanwhile, taking electrons as the research object, the interception ability of 12 kinds of FS to particles was compared, and the optimal structure of the FS slit is determined.

nuclear science & technology
Development of megawatt radiofrequency ion source for the neutral beam injector on HL-2A tokamak

G.J. Lei,L.W. Yan,D.P. Liu,X.M. Zhang,M. Zhao,S.F. Geng,M. Li,Y.X. Zhang,Z.H. Bi,Y.N. Bu,W.M. Xie,G.Q. Zou,L.P. Huang,B.W. Zhou,H.Y. Fan,X.Z. Ma,Q. Yu,Bo Lu,Z.B. Shi,C.P. Zhou,M. Xu,X.R. Duan

DOI: https://doi.org/10.1088/1741-4326/abd2c6

IF: 3.3

2021-02-15

Nuclear Fusion

Abstract:Abstract A radiofrequency (RF) ion source with a megawatt power extraction, thunder I, has been developed for the neutral beam injector (NBI) on HL-2A tokamak. A full solid-state RF generator with output power of 80 kW and frequency of 2 MHz was built by an RF combiner using 8 modules of solid-state RF generator with power of P RF = 10 kW. The line electric efficiency of whole RF generator reaches 92% and its voltage standing wave ratio (VSWR) is 1.01, thus no water-cooling system is supplied. A quartz vessel with the inner diameter of 250 mm is directly adopted for resisting atmospheric pressure, which can dramatically simplify source structure. Nowadays, the extracted beam parameters of RF hydrogen ion source are 32 kV/20 A/0.1 s on a test bed, while the design parameters are 50 kV/20 A/3 s. The beam density profile measured by the infrared imaging technique at 1.3 m downstream from the grounded grid obeys a Gaussian distribution, and the corresponding half width of 1/ e power decay at the matched condition is about 80 mm. Plasma homogeneity is over 90% at low RF power. The beam divergence angle meets the requirement of NBI system on HL-2A tokamak. The extractable current density increases almost linearly with the RF power. It reaches 2400 A m −2 at P RF = 32 kW. The ion density in front of plasma grid is about 1 × 10 18 m −3 , corresponding to an ionized fraction of about 1% at the gas pressure of 0.5 Pa. Single hydrogen ion fraction reaches 79% at the beam current of 12.4 A. Some improvements have been considered for optimizing ion source performance on next experimental campaign. One smaller auxiliary RF discharge chamber equipped with a gas feed path, driven by 13.56 MHz/3.5 kW generator, is connected to main discharge chamber driven by 2 MHz/40 kW generator. By this dual-driven configuration, the innovative RF plasma source with high-pressure density gradient solves the initial ignition problem of powerful RF ion source even if the gas pressure below 0.1 Pa. In addition, the RF negative hydrogen ion source of 200 kV/20 A/3600 s is also developed at SWIP for the China fusion engineering test reactor.

physics, fluids & plasmas
Development of Rf Driver Used in Negative Ion Source at Hust

Xiaofei Li,Dong Li,Kaifeng Liu,Xiaomin Wang,Peng Zhao,Chi Zhou,Tianyu Zheng,Dezhi Chen

DOI: https://doi.org/10.1007/s10894-015-9940-5

IF: 1.793

2015-01-01

Journal of Fusion Energy

Abstract:The setting up of RF based negative ion experimental facility shall witness the beginning of experiments on the negative ion source fusion applications in Huazhong University of Science and Technology, China. At the current development stage, we have built a RF driver which will produce the plasma required for yielding negative ions. The experimental system is similar to a RF based negative ion source, BATMAN, presently operating at IPP but not identical. The operation of driver is supported by many subsystems e.g. vacuum pumping system with gate valves, cooling water system, gas feed system, RF generator, data acquisition, control system, and different diagnostics. Most of them were completed on schedule. Some diagnostics are proposed to measure different plasma parameters in the driver and the expansion volume. A Langmuir probe and an OES is used in this facility. Some main diagnosis is shown in this paper.
Study on stray electrons ejecting from a long-pulse negative ion source for fusion

Yuwen Yang,Jianglong Wei,Yuming Gu,Yahong Xie,Chundong Hu

DOI: https://doi.org/10.1088/1361-6587/ad3c1e

IF: 2.532

2024-04-09

Plasma Physics and Controlled Fusion

Abstract:The negative ion based neutral beam injection (NNBI) is a desirable plasma heating and current drive method for the large-scale magnetic fusion devices. Due to the strict requirements and difficult development of the negative ion source for fusion, a long-pulse negative ion source has been developed under the framework of the Comprehensive Research Facility for Fusion Technology (CRAFT) in China. This negative ion source consists of a single RF driver plasma source and a three-electrode accelerator. The typical extraction and acceleration voltage are 4~8 kV and 40~50 kV, respectively. During one shot of the long-pulse (~100 s) beam extraction, the gas pressure in the vacuum vessel increased sharply and the temperature of the cryopump rise from 8 K to 20 K. Moreover, the vessel wall appeared a high temperature after several long-pulse shots. A self-consistent simulation of beam-gas interaction revealed that the heat loads on the vessel wall should be caused by the stray electrons ejecting from the accelerator. Those stray electrons are mainly generated via the stripping or ionization collisions and strongly deflected by the downstream side of the deflection magnetic field for the co-extracted electron. The location of hot spots measured by infrared thermography is consistent with the simulation results. To solve this problem, a series of electron dumps are designed to avoid the direct impinging of the ejecting electrons on the cryopump and the vessel wall. And the results suggest that the hot spots are almost eliminated.

physics, fluids & plasmas
Influence of cusp magnetic field configuration on plasma parameters of radio frequency driven negative ion source for CRAFT NNBI

Yuqian CHEN,Lixin YANG,Yahong XIE,Guojian SU,Jianglong WEI,Yuming GU,Xufeng PENG,Na WANG,Lizhen LIANG,Chundong HU

DOI: https://doi.org/10.1016/j.fusengdes.2024.114149

IF: 1.905

2024-01-09

Fusion Engineering and Design

Abstract:Radio Frequency (RF) driven negative ion source is the preferred ion source for negative ion based Neutral Beam Injection system (NNBI). The plasma generator, which consists of RF driver(s) and an expansion chamber, is one of the key parts for NNBI. The distribution of cusp magnetic field which is generated by permanent magnets installed at the lateral wall of the expansion chamber is a common issue, due to the great influence on electron density, electron temperature and spatial uniformity of plasma density in the extraction area. Two kinds of configuration of cusp magnetic field (checkerboard type and symmetric type) and three types of arrangement of permanent magnets (with three, four and five rows of magnets) have been carried out with the approach of finite element and the experimental performance. On the RF negative ion source testbed, a moveable Langmuir probe has been adopted to investigate the characteristic of electron density and temperature near the extraction area. Since the symmetric type with three rows of permanent magnets generates the distribution of cusp magnetic field that contribute to extract the plasma from RF driver and improve the probability of particle collision easily, the higher electron density and the lower electron temperature was obtained via simulation. The experimental conclusion is that the symmetric type with three rows of permanent magnets leads to a higher electron density and lower electron temperature, showing a great agreement with simulation results. The results are helpful to optimize the structure and performance of high power ion source, and provide support for the development of large area RF negative ion sources with multi-driver.

nuclear science & technology
PISCES-RF: a liquid-cooled high-power steady-state helicon plasma device

Saikat Chakraborty Thakur,Michael J. Simmonds,Juan F. Caneses,Fengjen Chang,Eric M. Hollmann Russell P. Doerner,Richard Goulding,Arnold Lumsdaine,Juergen Rapp,George R. Tynan

DOI: https://doi.org/10.48550/arXiv.2005.11214

2020-12-30

Abstract:Radio-frequency (RF) driven helicon plasma sources can produce relatively high-density plasmas (n > 10^19 m-3) at relatively moderate powers (< 2 kW) in argon. However, to produce similar high-density plasmas for fusion relevant gases such as hydrogen, deuterium and helium, much higher RF powers are needed. For very high RF powers, thermal issues of the RF-transparent dielectric window, used in the RF source design, limit the plasma operation timescales. To mitigate this constraint, we have designed, built and tested a novel liquid-cooled RF window which allows steady state operations at high power (up to 20 kW). De-ionized (DI) water, flowing between two concentric dielectric RF windows, is used as the coolant. We show that a full azimuthal blanket of DI water does not degrade plasma production. We obtain steady-state, high-density plasmas (n > 10^19 m-3, T_e ~ 5 eV) using both argon and hydrogen. From calorimetry on the DI water, we measure the net heat that is being removed by the coolant at steady state conditions. Using infra-red (IR) imaging, we calculate the constant plasma heat deposition and measure the final steady state temperature distribution patterns on the inner surface of the ceramic layer. We find that the heat deposition pattern follows the helical shape of the antenna. We also show the consistency between the heat absorbed by the DI water, as measured by calorimetry, and the total heat due to the combined effect of the plasma heating and the absorbed RF. These results are being used to answer critical engineering questions for the 200 kW RF device (MPEX: Materials Plasma Exposure eXperiment) being designed at the Oak Ridge National Laboratory (ORNL) as a next generation plasma material interaction (PMI) device.

Plasma Physics
The spatio-temporal evolution of laser-induced initial plasma in RF ICP source for CFETR NBI

Chao Chen,Yang Xia,Qiang Wang,Wenzhi Zhai,Yunqiu Cui,Chunjie Niu,Guangjiu Lei,Weiyuan Ni,Dongping Liu

DOI: https://doi.org/10.1016/j.fusengdes.2024.114211

IF: 1.905

2024-02-03

Fusion Engineering and Design

Abstract:The basis for the negative hydrogen ion-based China Fusion Engineering Test Reactor (CFETR) neutral beam injection (NBI) is the radio frequency (RF) inductively coupled plasma (ICP) source, which operates at 2 MHz under the gas pressure of 0.3 Pa. However, it is difficult for the RF ion source to ignite the plasma at such low gas pressure. Thus, the formation of the initial RF plasma is very important for improving the stability of the ion source. In our work, it is demonstrated that pulsed laser ablation with a tungsten (W) target can cause the formation of initial plasmas, as measured by ICCD camera. Meanwhile, a two-dimensional self-consistent fluid-plasma model is used to study the spatio-temporal evolution of the laser-induced plasma in RF ICP source. In the experiment, the gas pressure is kept at 0.3 Pa, and the laser power density is kept at 2 GW/cm 2 . The results show that the spatio-temporal evolution of the plasma remains almost unchanged after 10 μs and has similar profile for various powers. The results of our model fit well with the experimental data. In the simulation, the plasma expansion progress is much slower at a higher pressure due to the increased collision processes. Moreover, when the initial electron production rate given in this model increases, more time is required to reach a steady state plasma. It is expected that the results can provide more insight into the plasma expansion process of laser-induced ignition by RF ICP source.

nuclear science & technology
RF Simulation and Improvements of an Ion Source Test Facility at HUST

Peng Zhao,Dong Li,Dezhi Chen,Chen Zuo,Xiaofei Li,Mingwu Fan

DOI: https://doi.org/10.1016/j.fusengdes.2018.05.016

IF: 1.905

2018-01-01

Fusion Engineering and Design

Abstract:Huazhong University of Science and Technology is developing a small RF based ion source for testing key techniques of the negative ion source. Numerical simulations of the source are performed with a commercial high frequency finite element analysis (FEA) software. The Faraday screen (FS) is included in the 3D model to reproduce the realistic electromagnetic fields in the driver. The plasma is approximated as a homogeneous electrically conducting medium in the discharge zone. Physical images of the electromagnetic (EM) fields in the driver with/without FS or plasma are presented and compared: (1) The FS suppresses effectively the axial electric field in the discharge zone, therefore diminishes the capacitive coupling between the antenna and plasma. (2) The existence of plasma intensifies the induced azimuthal electric field in the discharge zone and further enhances the inductive coupling between the antenna and plasma. The equivalent antenna impedances loaded with plasma are evaluated by this FEA method as well as an analytical method based on the ICP transformer model. The results are used to design the matching network, which employs a transformer-insulated Γ-type topology. Two strategies of matching by adjusting capacitors and operating frequency are investigated and proved both feasible. To improve the RF coupling between the antenna and plasma, an optimized concept design of the RF driver which employs the ferromagnetic enhancement technique is presented and the simulation results prove its feasibility.
Experimental results of a magnetic field modification to the radio frequency driver of a negative ion source

XIE Junwei,XIE Yahong,WEI Jianglong,Lizhen LIANG,PENG Xufeng,YANG Yuwen,GU Yuming,HU Chundong,XIE Yuanlai,Junwei Xie,Yahong Xie,Jianglong Wei,Lizhen Liang,Xufeng Peng,Yuwen Yang,Yuming Gu,Chundong Hu,Yuanlai Xie

DOI: https://doi.org/10.1088/2058-6272/ad1043

2023-11-28

Plasma Science and Technology

Abstract:Abstract A magnetic field produced by a current flowing through the Plasma Grid (PG) is one of the solutions to reduce collisional loss of negative ions in a negative ion source, which reduces the electron temperature in front of the PG. However the magnetic field diffused into the driver has some influences on the plasma outflowing. In order to investigate the effect of changing this magnetic field on the outflowing of plasma from the driver a circular ring (absorber), of high permeability iron has been introduced at the driver exit, which can reduce the magnetic field around and improve plasma outflowing. With the application of absorber, the electron density is increased by about 35%, and the extraction current measured from extraction grid is increased from 1.02 A to 1.29 A. The results of extraction experiment with cesium injection show that both Extraction Grid (EG) current and H− current are increased when the absorber introduced.

physics, fluids & plasmas
The engineering design of half-size RF negative ion source for CRAFT-NNBI

Yuming Gu,Jianglong Wei,Jichun Chen,Yongjian Xu,Jun Li,Lizhen Liang,Caichao Jiang,Yuanlai Xie,Chundong Hu,Yahong Xie

DOI: https://doi.org/10.1016/j.fusengdes.2023.113603

IF: 1.905

2023-03-01

Fusion Engineering and Design

Abstract:The full-size radio frequency (RF) negative ion source used in comprehensive research facility for fusion technology (CRAFT) has four drivers, which are arranged in the vertical direction. In order to study the physical and engineering issues, a quarter-size negative ion source was designed, developed and tested in ASIPP. This source has only one driver, making it impossible to research radio frequency interference and large-area plasma uniformity when multiple drivers work together. Therefore, a half-size negative ion source with dual drivers is developed in this study. The half-size negative ion source with dual drivers has been successfully developed and used as a module. Two half-size negative ion sources were assembled after the improvement to complete the overall design of the full-size negative ion source, which is of great significance to the entire beam source project. This paper mainly introduced the structural design, structural finite element analysis and key component manufacturing process test of the half-size negative ion source.

nuclear science & technology
A Miniaturized ECR Plasma Flood Gun for Wafer Charge Neutralization.

Yaoxiang Jiang,Shixiang Peng,Wenbin Wu,Tenghao Ma,Jingfeng Zhang,Haitao Ren,Kai Li,Tao Zhang,Jiamei Wen,Yuan Xu,AiLin Zhang,Jiang Sun,Zhiyu Guo,Jia'er Chen

DOI: https://doi.org/10.1063/1.5128522

IF: 1.6

2020-01-01

Review of Scientific Instruments

Abstract:In modern ion implanters, a plasma flood gun (PFG) is used to neutralize wafer charge during the doping process, preventing the breakdown of floating wafers caused by the space charge accumulation. Typically, there are two kinds of PFGs, namely, dc arc discharge with filament and RF discharge. As a PFG, the filament one has limited lifetime and cannot avoid metallic contamination because of the thermal emitting filament. RF discharge PFG has been developed to solve these problems, including prolonging the source lifetime and avoiding metal pollution. Recently, a 2.45 GHz electron cyclotron resonance (ECR) ion source is also regarded as a potential choice for PFG. However, the dimension of the 2.45 GHz ECR source system including the size of the source itself and its meter's length RF subsidiary limits its application within an ion implanter. At Peking University, a miniaturized 2.45 GHz permanent magnet electron cyclotron resonance plasma flood gun with a coaxial RF transmission line has been built and tested. The dimensions of the ECR source body are Φ60 mm × Φ88 mm with a Φ30 mm × Φ40 mm plasma chamber. Its RF transmission line consists of a 200 W microwave generator, a 30 cm coaxial line, a 7 cm coaxial-to-waveguide transducer, and a microwave window that also serves as a vacuum seal. In continuous wave experiments, the electron extraction currents can be as high as 8.8 mA at an input RF power of 22 W with argon gas. The gas flow is less than 1.0 SCCM for this test.
Impedance Characteristic Analysis and Preliminary Experimental Results of a High-Power RF Plasma Source

Puqiong Yang,Bo Liu,Caichao Jiang,Xin Yang,Jianglong Wei,Yahong Xie,Yongjian Xu,Lizhen Liang,Yuanzhe Zhao,Yuanlai Xie,Jinxin Wang,Chundong Hu

DOI: https://doi.org/10.1109/tps.2022.3154397

IF: 1.368

2022-04-01

IEEE Transactions on Plasma Science

Abstract:To study the characteristics of radio frequency (RF) power coupling, RF plasma diagnostics, actively cooled tube, and negative ion production, a plasma source was designed as a small-scale test facility. The matching network was carefully designed and successfully applied to the 2-MHz RF plasma source. In this article, the design method of the matching unit will be presented; with the assistance of this matching unit, the RF plasma source was successfully lit and the reflected power was reduced to a very low level. A probe was installed in front of or in the rear of the matching network, respectively, to in situ measure the RF voltage, current, and phase angle. The equivalent resistance of the RF plasma source was analyzed in detail. The RF power coupling efficiency was derived in two different methods, and the relationship between the coupling efficiency and the equivalent resistance of the plasma source is verified. At the same time, the equivalent resistance of the plasma source was also collected to optimize the matching unit.

physics, fluids & plasmas
Experimental investigation of the electromagnetic effect and improvement of the plasma radial uniformity in a large-area, very-high frequency capacitive argon discharge

HAN Daoman,SU Zixuan,ZHAO Kai,LIU Yongxin,GAO Fei,WANG Younian,Daoman HAN,Zixuan SU,Kai ZHAO,Yongxin LIU,Fei GAO,Younian WANG

DOI: https://doi.org/10.1088/2058-6272/abf72a

2021-05-01

Plasma Science and Technology

Abstract:Abstract We performed an experimental investigation on the electromagnetic effect and the plasma radial uniformity in a larger-area, cylindrical capacitively coupled plasma reactor. By utilizing a floating hairpin probe, dependences of the plasma radial density on the driving frequency and the radio-frequency power over a wide pressure range of 5–40 Pa were presented. At a relatively low frequency (LF, e.g. 27 MHz), an evident peak generally appears near the electrode edge for all pressures investigated here due to the edge field effect, while at a very high frequency (VHF, e.g. 60 or 100 MHz), the plasma density shows a sharp peak at the discharge center at lower pressures, indicating a strong standing wave effect. As the RF power increases, the center-peak structure of plasma density becomes more evident. With increasing the pressure, the standing wave effect is gradually overwhelmed by the ‘stop band’ effect, resulting in a transition in the plasma density profile from a central peak to an edge peak. To improve the plasma radial uniformity, a LF source is introduced into the VHF plasma by balancing the standing wave effect with the edge effect. A much better plasma uniformity can be obtained if one chooses appropriate LF powers, pressures and other corresponding discharge parameters.

physics, fluids & plasmas
Improvement of Miniaturized 2.45 GHz ECR Plasma Flood Gun at PKU

Bujian Cui,Shixiang Peng,Wenbin Wu,Tenghao Ma,Yaoxiang Jiang,Zhiyu Guo,Jiaer Chen

DOI: https://doi.org/10.1088/1748-0221/18/10/p10038

2023-01-01

Journal of Instrumentation

Abstract:In an ion implanter, plasma flood gun (PFG) is used to provide electrons to neutralize the accumulated charge on the wafer surface to avoid breakdown damage. With the development of ion implantation technology, four key requirements have been put forward for PFG. They are simple structure, plasma with high density and low electron temperature, no metal contamination and long life. The existing PFG, such as the filament type PFG, can hardly meet the above requirements at the same time. 2.45 GHz ECR ion source with the advantages of high beam density, high stability, long life time and no filament metal contamination, has shown great potential to work as PFG. Recently, a miniaturized 2.45 GHz permanent magnet electron cyclotron resonance PFG (PMECR-PFG) has been developed at Peking University (PKU). In our previous test, 8.8 mA electron extraction current was obtained with argon gas. In this work, by optimizing the magnetic field configuration to a resonant configuration, the performance of this ECR-PFG was greatly improved. With 100 W microwave power, an 80 mA electron current load was obtained under the extraction voltage of 0.1 kV. To minimize the metal contamination, a three-slit graphite plasma electrode was fabricated and a 50 mA load was generated at only 30 W RF power. During all tests, the gas consumption rate is lower than 0.6 sccm, which is beneficial to maintain the vacuum of implanter beamline.
Prototype of a 2.45 GHz cylindrical ceramic dielectric antenna surface wave plasma source for flood gun

Shixiang Peng,Bujian Cui,Yaoxiang Jiang,Tenghao Ma,Wenbin Wu,Zhiyu Guo,Jiaer Chen

DOI: https://doi.org/10.1016/j.vacuum.2024.113312

IF: 4

2024-05-24

Vacuum

Abstract:In modern ion implanters, plasma flood gun (PFG) is used to neutralize wafer charge during doping process, preventing the breakdown damage of floating wafers caused by the space charge accumulation. Surface wave (SW) plasma source is a potential choice for PFG, because of its no metal pollution, simple structure, high current intensity and low cost for ion implanters. At Peking University (PKU), a 2.45 GHz surface wave PFG (SW-PFG) with a cylindrical dielectric antenna was designed and tested recently. It aims to obtain plasma at the gas pressure of several 10 −3 Pa and below which is strictly required by the ion implanter. A two-dimensional discharge model was established to optimize the cylindrical dielectric antenna structure. Through optimization of operation parameters, the electron current intensity of 88 mA was obtained with RF power 500 W and gas pressure 5.0 × 10 −3 Pa in the experiments, which meets the requirement of ion implanters. Further, through optimization of operation parameters, the electron current intensity could reach 140 mA. In addition, by setting the graphite liner to isolate the metal cavity wall and plasma, the improvement in the long-term operation stability has been confirmed, which laid a solid foundation for the industrial application of the SW-PFG.

materials science, multidisciplinary,physics, applied
High Rep Rate High Performance Plasma Focus As a Powerful Radiation Source

S Lee,P Lee,GX Zhang,ZP Feng,VA Gribkov,M Liu,A Serban,TKS Wong

DOI: https://doi.org/10.1109/27.725141

IF: 1.368

1998-01-01

IEEE Transactions on Plasma Science

Abstract:Basic operational characteristics of the plasma focus are considered from design perspectives to develop powerful radiation sources. Using these ideas we have developed two compact plasma focus (CPF) devices operating in neon with high performance and high repetition rate capacity for use as an intense soft X-ray (SXR) source for microelectronics lithography, The NX1 is a four-module system with a peak current of 320 kA when the capacitor bank (7.8 mu F x 4) is charged to 14 kV, It produces 100 J of SXR per shot (4% wall plug efficiency) giving at 3 Hz, 300 W of average SXR power into 4 pi. The NX2 is also a four-module system. Each module uses a rail gap switching 12 capacitors each with a capacity of 0.6 mu F. The NX2 operates with peak currents of 400 kA at 11.5 kV into water-cooled electrodes at repetition rates up to 16 Hz to produce 300 W SXR in burst durations of several minutes. SXR lithographs are taken from both machines to demonstrate that sufficient SXR flux is generated for an exposure with only 300 shots. In addition, hash electron lithographs are also obtained requiring only ten shots per exposure. Such high performance compact machines may be improved to yield over 1 kW of SXR, enabling sufficient exposure throughput to be of interest to the wafer industry. In deuterium the neutron yield-could be over 10(10) neutrons per second over prolonged bursts of minutes.

[20 years' experience with Charnley low friction arthroplasty--striving for durability and future prospects].

Engineering design and manufacturing of a radio frequency plasma driver without Faraday shield for NBI application

Research and development progress of radio frequency ion source for neutral beam injector at ASIPP

Critical slowing down near the smectic-A-hexatic-B transition

The use of the Peltier effect for simple and accurate calibration of thermoelectric devices

Design optimization of slit aperture Faraday shield for RF ion source in CRAFT NNBI system

Development of megawatt radiofrequency ion source for the neutral beam injector on HL-2A tokamak

Development of Rf Driver Used in Negative Ion Source at Hust

Study on stray electrons ejecting from a long-pulse negative ion source for fusion

Influence of cusp magnetic field configuration on plasma parameters of radio frequency driven negative ion source for CRAFT NNBI

PISCES-RF: a liquid-cooled high-power steady-state helicon plasma device

The spatio-temporal evolution of laser-induced initial plasma in RF ICP source for CFETR NBI

RF Simulation and Improvements of an Ion Source Test Facility at HUST

Experimental results of a magnetic field modification to the radio frequency driver of a negative ion source

The engineering design of half-size RF negative ion source for CRAFT-NNBI

A Miniaturized ECR Plasma Flood Gun for Wafer Charge Neutralization.

Impedance Characteristic Analysis and Preliminary Experimental Results of a High-Power RF Plasma Source

Experimental investigation of the electromagnetic effect and improvement of the plasma radial uniformity in a large-area, very-high frequency capacitive argon discharge

Improvement of Miniaturized 2.45 GHz ECR Plasma Flood Gun at PKU

Prototype of a 2.45 GHz cylindrical ceramic dielectric antenna surface wave plasma source for flood gun

High Rep Rate High Performance Plasma Focus As a Powerful Radiation Source