Abstract:The high-precision integration of three-dimensional (3D) microoptical components into microfluidics in a customizable manner is crucial for optical sensing, fluorescence analysis, and cell detection in optofluidic applications; however, it remains challenging for current microfabrication technologies. This paper reports the in-channel integration of flexible two-dimensional (2D) and 3D polymer microoptical devices into glass microfluidics by developing a novel technique: flat scaffold-supported hybrid femtosecond laser microfabrication (FSS-HFLM). The scaffold with an optimal thickness of 1–5 µm is fabricated on the lower internal surface of a microfluidic channel to improve the integration of high-precision microoptical devices on the scaffold by eliminating any undulated internal channel surface caused by wet etching. As a proof of demonstration, two types of typical microoptical devices, namely, 2D Fresnel zone plates (FZPs) and 3D refractive microlens arrays (MLAs), are integrated. These devices exhibit multicolor focal spots, elongated (>three times) focal length and imaging of the characters ‘RIKEN’ in a liquid channel. The resulting optofluidic chips are further used for coupling-free white-light cell counting with a success rate as high as 93%. An optofluidic system with two MLAs and a W-filter is also designed and fabricated for more advanced cell filtering/counting applications. By fabricating microscale polymer lenses in hollow glass microchannels, scientists realize an optofluidic chip that detects and counts cells. This scheme works by employing a femtosecond laser to ‘grow’ by two-photon polymerization various three-dimensional optical structures, such as microlens arrays, on a flat polymer scaffold on the internal surface of a microfluidic channel. White light is then shone through the lenses and the presence of cells in the optical path is detected by a drop in light transmission. Dong Wu and co-workers from RIKEN’s Laser Technology Laboratory in Japan and Jilin University in China say that this fabrication approach could also prove useful for constructing a variety of active and passive micro-optic devices, such as optical switches, on-chip microlasers and amplifiers for lab-on-a-chip applications.

An integrated, optofluidic system with aligned optical waveguides, microlenses, and coupling prisms for fluorescence sensing

Coiled Optical Nanofiber for Optofluidic Absorbance Detection.

Ultra-Sensitive Nanofiber Fluorescence Detection In A Microfluidic Chip

A microfluidic device using a green organic light emitting diode as an integrated excitation source.

Integrated Microfluidic Spectroscopic Sensor Using Arrayed Waveguide Grating

Intensity-Interrogated Sensor Based on Cascaded Fabry–Perot Laser and Microring Resonator

Integrative Optofluidic Microcavity with Tubular Channels and Coupled Waveguides Via Two-Photon Polymerization

Molecularly imprinted polymer-coated hybrid optical waveguides for sub-aM fluorescence sensing

Fluorescence enhanced biomolecule detection using direct laser written micro-ring resonators

A Compact Fluorescence Detection System Integrated with Led and Pin Photodetector for Microfluidic Application

A Sequentially Bioconjugated Optofluidic Laser for Wash-out-free and Rapid Biomolecular Detection.

Optofluidic photonic crystal fiber platform for sensitive and reliable fluorescence based biosensing

Dual optofluidic distributed feedback dye lasers for multiplexed biosensing applications

Fluorescent chemo sensors based on “dually smart” optical micro/nano waveguides lithographically fabricated with AIE composite resins

All-in-fiber optofluidic sensor fabricated by femtosecond laser assisted chemical etching.

Integrated Microspectrometer for Fluorescence Based Analysis in a Microfluidic Format.

In-channel Integration of Designable Microoptical Devices Using Flat Scaffold-Supported Femtosecond-Laser Microfabrication for Coupling-Free Optofluidic Cell Counting

Portable Automatic Microring Resonator System Using a Subwavelength Grating Metamaterial Waveguide for High-Sensitivity Real-Time Optical-Biosensing Applications

Polymer-Coated Hollow Fiber Optofluidic Laser for Refractive Index Sensing

Implementation of Integrated VCSEL-Based Optical Feedback Interferometry Microfluidic Sensor System with Polymer Microoptics

Tubular Optical Microcavity for Optofluidic Application