Abstract:Compact photonic systems that offer high frequency stability and low noise are of increasing importance to applications in precision metrology, quantum computing, communication, and advanced sensing technologies. However, on-chip resonators comprised of dielectrics cannot match the frequency stability and noise characteristics of Fabry-Perot cavities, whose electromagnetic modes live almost entirely in vacuum. In this study, we present a novel strategy to interface micro-fabricated Fabry-Perot cavities with photonic integrated circuits to realize compact, high-performance integrated systems. Using this new integration approach, we demonstrate self-injection locking of an on-chip laser to a milimeter-scale vacuum-gap Fabry-Perot using a circuit interface that transforms the reflected cavity response to enable efficient feedback to the laser. This system achieves a phase noise of -97 dBc/Hz at 10 kHz offset frequency, a fractional frequency stability of 5*10-13 at 10 ms, a 150 Hz 1/pi integral linewidth, and a 35 mHz fundamental linewidth. We also present a complementary integration strategy that utilizes a vertical emission grating coupler and a back-reflection cancellation circuit to realize a fully co-integrated module that effectively redirects the reflected signals and isolates back-reflections with a 10 dB suppression ratio, readily adaptable for on-chip PDH locking. Together, these demonstrations significantly enhance the precision and functionality of RF photonic systems, paving the way for continued advancements in photonic applications.

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Ultrastable vacuum-gap Fabry–Perot cavities operated in air

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