Abstract:Radio-frequency communication systems have long used bulk- and surface-acoustic-wave devices supporting ultrasonic mechanical waves to manipulate and sense signals. These devices have greatly improved our ability to process microwaves by interfacing them to orders-of-magnitude slower and lower loss mechanical fields. In parallel, long-distance communications have been dominated by low-loss infrared optical photons. As electrical signal processing and transmission approaches physical limits imposed by energy dissipation, optical links are now being actively considered for mobile and cloud technologies. Thus there is a strong driver for wavelength-scale mechanical wave or "phononic" circuitry fabricated by scalable semiconductor processes. With the advent of these circuits, new micro- and nanostructures that combine electrical, optical and mechanical elements have emerged. In these devices, such as optomechanical waveguides and resonators, optical photons and gigahertz phonons are ideally matched to one another as both have wavelengths on the order of micrometers. The development of phononic circuits has thus emerged as a vibrant field of research pursued for optical signal processing and sensing applications as well as emerging quantum technologies. In this review, we discuss the key physics and figures of merit underpinning this field. We also summarize the state of the art in nanoscale electro- and optomechanical systems with a focus on scalable platforms such as silicon. Finally, we give perspectives on what these new systems may bring and what challenges they face in the coming years. In particular, we believe hybrid electro- and optomechanical devices incorporating highly coherent and compact mechanical elements on a chip have significant untapped potential for electro-optic modulation, quantum microwave-to-optical photon conversion, sensing and microwave signal processing.

Simultaneous guidance of slow photons and slow acoustic phonons in silicon phoxonic crystal slabs

On‐Chip Tightly Confined Guiding and Splitting of Surface Acoustic Waves Using Line Defects in Phononic Crystals

Simultaneous manipulation of electromagnetic and elastic waves via glide symmetry phoxonic crystal waveguides

Generating 10-GHz phonons in nanostructured silicon membrane optomechanical cavity

Inverse Design of a Photonic Moiré Lattice Waveguide Towards Improved Slow Light Performances

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Photonic Moire lattice waveguide with a large slow light bandwidth and delay-bandwidth product

Waveguiding inside the complete band gap of a phononic crystal slab

Silicon Acoustic Waveguide Based on Locally Resonant Phononic Crystal

Guided acoustic and optical waves in silicon-on-insulator for Brillouin scattering and optomechanics

Interaction of Acoustic Phonons and Photons in Highly Nonlinear Photonic Crystal Fibers

Non-classical mechanical states guided in a phononic waveguide

Simulation and fabrication of slow light suspended air-bridge AlGaAs photonic crystal waveguide

Refraction, beam splitting and dispersion of GHz surface acoustic waves by a phononic crystal

Engineering nanoscale hypersonic phonon transport

Wideband slow light with ultralow dispersion in a W1 photonic crystal waveguide.

Optimizing Phononic Crystal Waveguides for Acoustically Induced Spin Transport

Controlling phonons and photons at the wavelength-scale: silicon photonics meets silicon phononics

Gigahertz phononic integrated circuits on thin-film lithium niobate on sapphire

Electrically driven acousto-optics and broadband non-reciprocity in silicon photonics

Velocity of a SAW propagating in a 2D phononic crystal