Polymer Photonic Crystal Nano-Systems Fabricated by Nanoimprint Lithography

Choon‐Gi Choi,Young-Tak Han,J. Kim

DOI: https://doi.org/10.1109/SICE.2006.314807

2006-10-01

Abstract:We applied the nanoimprint lithography to replicate two-dimensional photonic crystal slab waveguides with a triangular array of air-holes on polystyrene. The photonic band gap structures, calculated by the plane wave expansion technique, shows that 2-D polystyrene photonic crystal slabs have a complete small photonic band gaps between 0.49 and 0.51 for the TE-like modes. The fabrication process of 2-D polystyrene photonic crystal slab waveguides is reported. The dimensions of the fabricated line defected waveguide slab structures with a triangular array of air holes correspond well to those of the proposed structures. The nanoimprinted polymer photonic crystal slabs will be attractive candidates for the implementations of ultra-compact low cost photonic crystal nano-systems