Integrated nanotube circuits: Controlled growth and ohmic contacting of single-walled carbon nanotubes

Hyongsok T Soh, Calvin F Quate, Alberto F Morpurgo, Charles M Marcus, Jing Kong, Hongjie Dai
1999-08-02
Abstract:Single-walled carbon nanotubes are synthesized by chemical vapor deposition of methane at controlled locations on a substrate using patterned catalytic islands. The combined synthesis and microfabrication technique presented here allows a large number of ohmically contacted nanotube devices with controllable length to be placed on a single substrate. Transport studies demonstrate ohmic contacting, giving two-terminal resistances as low as 20 k at low temperatures.© 1999
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