Abstract:International Journal of Modern Physics B, Ahead of Print. Advancement in the understanding of fundamental aspects of Secondary Ion Mass Spectrometry (SIMS) has made this technique to be extremely powerful for quantitative materials analysis. The secondary ion emission process is a complex phenomenon involving various mechanisms to understand the mechanism. Among the existing mechanisms, the "electron-tunneling model" is the most accepted concept in the understanding of ionization probability for positive and negative ions. This model essentially concerns the survival probability of an ion emitted from the surface. As the intensity of secondary ions of a certain element depends strongly on the efficiency of ionization of a sputtered atom or molecule, the "local surface chemistry" plays a significant role in the secondary ion emission. This is purported as the "Matrix Effect" in SIMS, making the technique extremely challenging for quantification of materials in spite of the fact that it has the highest detection sensitivity (<ppb) and exceptional depth-resolution (<1[math]nm). Therefore, it is required to correct the "matrix effect" for quantitative analysis. If the probing element (M) in its close proximity sees an alkali element (such as Li, Rb, K, Na and Cs, referred to as "A") on the sample surface, the sputtered neutral atom (M0) of the probing element can attach an alkali-ion forming a quasi-molecular (MA)[math] ion. Such a phenomenon can also occur if an alkali ion beam is chosen as the primary beam for sputtering. The MA[math] molecular ion formation is directly related to the atomic polarizability of the element M. Since the sputtering of neutral atom (M0) is unconnected with the formation of MA[math] ion, the "matrix effect" decreases dramatically in the analysis using MA[math] ions. The phenomenon is very similar to the mechanism of "secondary neutral mass spectrometry" (SNMS). Although these (MA)[math] molecular ions are potentially applicable in the direct quantification of materials without the need for "calibration standards", it generally has a weak intensity. In such a case, the (MA)[math] molecular ions are preferred in the analysis because of their higher detection sensitivity (by a few orders of magnitude in some cases), compared to that of (MA)[math] molecular ions. Monitoring of the molecular ions is routinely preferred in conventional SIMS experiments to discriminate the sputtered ion species which are affected by mass interference or have poor dynamic ranges. For example, while making the SIMS analysis of GaAs, carbon as an impurity element is detected by monitoring (AsC)[math] molecular ions instead of C− ions, because the C− ions have high background arising from the carbon-containing residual-gas species in the analysis chamber. Caesium is decidedly chosen for MCs[math] or MCs[math] molecular ions in SIMS because of the strongest reactivity and electropositive nature of caesium. This paper deals with a comprehensive discussion on the ion-emission phenomena in sputtering, the "matrix effect" and its compensation, and the potential application of the "MCs[math]-SIMS" ([math]) in the effective quantitative chemical analysis of materials. A special prominence has been given to the quantification of low-dimensional materials, superlattices and quantum-confined structures using this state-of-the-art "MCs[math]-SIMS" approach in all complexities.

Electron Microprobe/SIMS Determinations of Al in Olivine: Applications to Solar Wind, Pallasites and Trace Element Measurements

High-precision in Situ Silicon Isotopic Analyses by Multi-Collector Secondary Ion Mass Spectrometry in Olivine and Low-Calcium Pyroxene

Potential Orthopyroxene, Clinopyroxene and Olivine Reference Materials for in Situ Lithium Isotope Determination

Quantification of aluminium and silicon‐containing materials using Ag Lα X‐rays

New Olivine Reference Material for In Situ Microanalysis

Triple‐oxygen isotopes of stony micrometeorites by secondary ion mass spectrometry (SIMS): Olivine, basaltic glass and iron oxide matrix effects for sensitive high‐mass resolution ion microprobe‐stable isotope (SHRIMP‐SI)

High-Precision Measurement of Trace Level Na, K, P, S, Cr, and Ni in Lunar Glass Using Electron Probe Microanalysis

Germanium and silicon isotope investigations in Main-Group and Eagle Station pallasites.

Trace elements determination by femtosecond LA-ICP-MS of 10 mg extraterrestrial geological samples prepared as lithium borate glasses

Spectral Deconvolution Analysis on Olivine-Orthopyroxene Mixtures with Simulated Space Weathering Modifications

Silicon Isotope Compositions of Soil and Sediment Reference Materials Determined by MC-ICP-MS

Electron Probe Microanalysis of Trace Sulfur in Basaltic Glasses and Silicate Minerals

Precise Measurement of Magnesium Isotopes in Feâ€�Mg Minerals Using a Multiâ€�collector SHRIMP Ion Microprobe

Rapid Determination of Trace Element Compositions in Peridotites by LA‐ICP‐MS Using an Albite Fusion Method

Electron microprobe technique for the determination of iron oxidation state in silicate glasses

Light Element (C, N, O) Quantification by EDXS: Application to Meteorite Water Content and Organic Composition

Quantitative analysis of Si in AlxGa1-xAs using quadrupole-based SIMS instrument

Alkali-metal-based molecular-ion secondary ion mass spectrometry for precise quantitative analysis of low-dimensional materials without standards

Re-evaluation of Lunar X-ray observations by Apollo 15 & 16

Accurate quantification of lithium in aluminium-lithium alloys with electron energy-loss spectrometry

Chromite Reference Materials and Matrix Effects in SIMS Oxygen Isotope Measurements