Abstract:A 2D ultrasonic array is the ultimate form of a focused ultrasonic system, which enables electronically focusing beams in a 3D space. A 2D array is also a versatile tool for various applications such as 3D imaging, high-intensity focused ultrasound, particle manipulation, and pattern generation. However, building a 2D system involves complicated technologies: fabricating a 2D transducer array, developing a pitch-matched ASIC, and interconnecting the transducer and the ASIC. Previously, we successfully demonstrated 2D capacitive micromachined ultrasonic transducer (CMUT) arrays using various fabrication technologies. In this paper, we present a 2D ultrasonic transmit phased array based on a 32 × 32 CMUT array flip-chip bonded to a pitch-matched pulser ASIC for ultrasonic neuromodulation. The ASIC consists of 32 × 32 unipolar high-voltage (HV) pulsers, each of which occupies an area of 250 μm × 250 μm. The phase of each pulser output is individually programmable with a resolution of 1/fC/16, where fC is less than 10 MHz. This enables the fine granular control of a focus. The ASIC was fabricated in the TSMC 0.18- μm HV BCD process within an area of 9.8 mm × 9.8 mm, followed by a wafer-level solder bumping process. After flip-chip bonding an ASIC and a CMUT array, we identified shorted elements in the CMUT array using the built-in test function in the ASIC, which took approximately 9 minutes to scan the entire 32 × 32 array. A compact-form-factor wireless neural stimulator system-only requiring a connected 15-V DC power supply-was also developed, integrating a power management unit, a clock generator, and a Bluetooth Low-Energy enabled microcontroller. The focusing and steering capability of the system in a 3D space is demonstrated, while achieving a spatial-peak pulse-average intensity ( ISPPA) of 12.4 and 33.1 W/ cm2; and a 3-dB focal volume of 0.2 and 0.05 mm3-at a depth of 5 mm-at 2 and 3.4 MHz, respectively. We also characterized transmission of ultrasound through a mouse skull and compensated the phase distortion due to the skull by using the programmable phase-delay function in the ASIC, achieving 10% improvement in pressure and a tighter focus. Finally, we demonstrated a ultrasonic arbitrary pattern generation on a 5 mm × 5 mm plane at a depth of 5 mm.

A Wearable Ultrasonic Neurostimulator - Part I: A 1D CMUT Phased Array System for Chronic Implantation in Small Animals

A Wearable Ultrasonic Neurostimulator-Part II: A 2D CMUT Phased Array System With a Flip-Chip Bonded ASIC

StimDust: A mm-scale implantable wireless precision neural stimulator with ultrasonic power and communication

Multimodal Wireless-Powered Flexible System for Closed-Loop Neuromodulation

A mm-sized acoustic wireless implantable neural stimulator based on a piezoelectric micromachined ultrasound transducer

A Wearable Ultrasound Transducer Array for Neuromodulation Applications in the Treatment of Diabetic Foot Disease

A Versatile Hermetically Sealed Microelectronic Implant for Peripheral Nerve Stimulation Applications

Bioadhesive Hydrogel-Coupled and Miniaturized Ultrasound Transducer System for Long-Term, Wearable Neuromodulation

Design, Fabrication, and Characterization of Capacitive Micromachined Ultrasonic Transducers for Transcranial, Multifocus Neurostimulation

A wireless and battery-less implant for multimodal closed-loop neuromodulation in small animals

Neurophysiological Evaluation of a Customizable Μecog-Based Wireless Brain Implant

An implantable piezoelectric ultrasound stimulator (ImPULS) for deep brain activation

A Portable Telemetry System for Brain Stimulation and Neuronal Activity Recording in Freely Behaving Small Animals

A 116.4 Mg Wireless Ultra-Lightweight Microstimulator for Cyborg Bees

A PWM-Based Method for Applying Ultrasound Neuro-Modulation

Patterned Electrical Brain Stimulation by a Wireless Network of Implantable Microdevices

A 100-Channel Hermetically Sealed Implantable Device for Chronic Wireless Neurosensing Applications

A Wireless Battery-Free Implant With Optical Telemetry for In Vivo Cortical Stimulation

Active microelectronic neurosensor arrays for implantable brain communication interfaces

An Implantable Wireless Neural Interface System for Simultaneous Recording and Stimulation of Peripheral Nerve with a Single Cuff Electrode

Analysis and Design of a PMUT-based transducer for Powering Brain Implants