Surface Brillouin scattering study of tantalum nitride (TaN) thin films

Jonah Kuria,Daniel Wamwangi,Darrell Comins,Arthur Every,Dave Billing
DOI: https://doi.org/10.1364/JOSAA.398746
2020-11-01
Abstract:Elastic properties of TaN films on (001)Si are investigated by surface Brillouin scattering (SBS). The velocity dispersion is obtained from Brillouin frequency shifts and surface acoustic wave phase velocities derived from measured SBS spectra. The observed Rayleigh surface acoustic and Sezawa waves indicate a soft on hard configuration. The elastic stiffnesses from the best fit of the calculated and measured spectra were C11=288 and C44=80GPa. Using these elastic constants in the surface elastodynamic Green's function yielded theoretical Brillouin spectra in agreement with measured spectra. Employing a least squares fitting procedure to the elastic constants gives uncertainties in C11 and C44 as ±3.7 and ±2.5GPa, respectively.
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