Abstract:This paper discusses the pulse signal of a highly sensitive lateral deformable optical microelectromechanical systems (MEMS) displacement sensor based on Wood's anomalies and its corresponding tolerance. The optical reflection amplitude of the device changes with the displacement of the nanostructured grating elements. Unexpectedly, the device's original sinusoidal signal develops into a new signal form (i.e., a pulse signal), when the air gap between the two layers of gratings decreases. Since the slope of the pulse signal, namely 2.5%/nm (i.e., 0.65 dB/nm), is eight times higher than that of the original signal form, namely 0.3%/ nm (i.e., 0.03 dB/nm), the sensitivity of the structure improves by eight times. However, this device is very sensitive to parameters such as its wavelength, period, duty ratio, and air gap. In this paper we used rigorous coupled wavelength analysis (RCWA) to analyze and optimize the respective influence of each parameter on the device's performance. We have introduced two methods to search for the optimal setting and have demonstrated the optimal settings of different incident lights. The simulation results indicate that it is close to 85% possible to achieve an actual device with the highest slope superior to 0.5%/nm and it is 64% possible that the highest slope of an actual device falls in the interval ranging from 1.0%/nm to 2.0%/nm. All the simulated data helped us better understand the tolerance of the pulse signal and guide us toward the development of an actual device. (C) 2015 Optical Society of America

MEMS-on-fiber sensor combining silicon diaphragm and supporting beams for on-line partial discharges monitoring

MEMS-on-fiber ultrasonic sensor with two resonant frequencies for partial discharges detection

Fiber optic Fabry–Perot sensor that can amplify ultrasonic wave for an enhanced partial discharge detection

Coherent OTDR Based Ultra-High Sensitive Acoustic Sensor Assisted with Distributed Microstructured Optical Fiber(DMOF) and Hollow Cylinder Transducer

Fiber Optic MEMS Ultrasonic Sensor and its Application in Partial Discharge Detection

Directional Sensitivity of a MEMS-Based Fiber-Optic Extrinsic Fabry⁻Perot Ultrasonic Sensor for Partial Discharge Detection

A fiber-optic Fabry-Perot acoustic sensor based on PDMS diaphragm

An extrinsic Fabry–Pérot interference fiber sensorfor ultrasonic detection of partial discharge

Highly Sensitive Lateral Deformable Optical MEMS Displacement Sensor: Anomalous Diffraction Studied by Rigorous Coupled-Wave Analysis.

A Fiber Optic Ultrasonic Sensor Using Polarization-maintaining Fiber for Partial Discharge Monitoring

Small In-Fiber Fabry-Perot Low-Frequency Acoustic Pressure Sensor with PDMS Diaphragm Embedded in Hollow-Core Fiber

A Large-Area and Nanoscale Graphene Oxide Diaphragm-Based Extrinsic Fiber-Optic Fabry–Perot Acoustic Sensor Applied for Partial Discharge Detection in Air

Ultrasensitive Measurement of Micronewton Force or Weak Dynamic Signal Based on PDMS Sealed Tapered Fiber Mach–Zehnder Interferometer

DFB-FL Applied in the Liquid-Solid Composite Dielectric for Ultra-High Sensitive Partial Discharge Acoustic Emission Detection

High Sensitivity and High Stability Dual Fabry-Perot Interferometric Fiber-Optic Acoustic Sensor Based on Sandwich-Structure Composite Diaphragm

A PCF Sensor Design Using Biocompatible PDMS for Biosensing

Partial Discharge Ultrasonic Detection Based on Sagnac Optical Interference Technique

Towards Optical Partial Discharge Detection with Micro Silicon Photomultipliers

High-sensitivity Hydraulic Pressure Sensor Realized with PDMS Film-Based Fabry-Perot Interferometer

High-sensitivity fiber-optic low-frequency acoustic detector based on cross-correlation demodulation

Plasmonic photonic crystal fiber sensor for optical partial discharge detection