A permeability membrane-type leak element based on PDMS

Zonglin Wang,Jun Zhang,Xudi Wang,Jun Wu
DOI: https://doi.org/10.1016/j.vacuum.2023.112853
IF: 4
2023-12-05
Vacuum
Abstract:In this work, a new method for making permeable leak elements based on polydimethylsiloxane was presented. This leak element can be obtained by attaching the prepared polydimethylsiloxane to a perforated metal foil and then encapsulating it. The leak's conductance of helium was measured by an improved volumetric test system. The experimental results show that the leak element made of polydimethylsiloxane has a constant conductance from 5 kPa to 100 kPa. Meanwhile, the conductance values under different membrane thicknesses were tested. It is shown that the membrane thickness is directly related to the conductance. The experimental results show that polydimethylsiloxane, unlike the solution-diffusion model followed by most polymer films, is more consistent on the micron scale with a sorption-desorption model that considers the non-equilibrium sorption-desorption process at the interface.
materials science, multidisciplinary,physics, applied
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