Air Core ARROW Waveguides Fabricated in a Membrane-Covered Trench

Seth Walker,Holger Schmidt,Aaron R. Hawkins
DOI: https://doi.org/10.3390/photonics11060502
IF: 2.536
2024-05-25
Photonics
Abstract:We report the design, fabrication, and characterization of hollow-core anti-resonant reflecting optical waveguides (ARROWs) fabricated in a membrane-covered trench. These structures are built on silicon wafers using standard microfabrication techniques, including plasma etching, to form trenches. Four waveguide designs are demonstrated, which have different numbers of thin-film reflecting layers. We demonstrate that optical loss decreases with additional reflecting layers, with measured loss coefficients as low as 1 cm−1.
optics
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