Nano Electro Mechanical Systems and Interactions at the nanoscale

A. Siria

2009-11-23

Abstract:Micro and Nano Electro Mechanical Systems (MEMS and NEMS) are among the best candidates for the measurement of interactions at the nanoscale. Resolution in force in the range of attonewton has been successfully exploited for the weighting of single molecules or the measurement of the spin of a single electron. NEMS and MEMS are generally mechanical devices made from submicron components facing each other. When the distance between the components reaches the sub-micron scale, phenomena generally neglected during macroscopic applications have to be taken into account. For example, the interaction mechanisms between the two surfaces moving at sub-micron separations are mediated by forces that, in macroscopic devices, are often irrelevant. In this thesis work we study interaction forces between surfaces when the the gap separating them is in the range from tens of nanometers up to several micrometers. First we address the problem of hydrodynamic forces acting on micro-structures oscillating in viscous environment. We show that the effect damping of a confined fluid is depending by the gap size of the confinement cavity. We study how this confinement effect can modify the properties of the mechanical oscillator. Second we address the problem of optical forces acting on micro mechanical oscillators. Using absorption and diffraction of X-ray beams we will see that effects usually observed using visible light can also be observed using X-rays. We show that Micro and possibly Nano Electro Mechanical System can be suitable for developing new tools in the domain of Synchrotron light techniques. Finally we study the thermal radiation between surfaces when the gap is the micron and sub-micron scale where the contribution of near field components cannot be neglected. We show measurement of thermal radiation between surfaces of glass providing a comparison with the theory of thermal radiation based on stochastic electrodynamics.

Materials Science,Engineering,Physics