Sputtered titanium nitride films with finely tailored surface activity and porosity for high performance on-chip micro-supercapacitors

Nana Sun,Dayu Zhou,Wenwen Liu,Aikui Li,Yunpeng Su,Peng Jiang,Yaozhong Zou,Shuyan Shi,Feng Liu
DOI: https://doi.org/10.1016/j.jpowsour.2020.229406
IF: 9.2
2021-03-01
Journal of Power Sources
Abstract:<p>Micro-supercapacitors (MSCs) are promising miniaturized and compact electrochemical energy storage devices for autonomous smart microelectronics. Unfortunately, it is still a challenge to produce high specific capacitance electrode materials with a technique compatible with micro-fabrication process. Here, on-chip MSCs based on sputtered TiN thin films are reported. Significantly, the surface chemistry and porosity of TiN films are systematically fine-tuned at the nanoscale to achieve high specific capacitances. Solid-state MSCs based on optimized TiN electrodes are fabricated using PVA/KOH as an electrolyte. Superior specific energy and power densities of 36.8 mWh cm<sup>−3</sup> and 20.6 W cm<sup>−3</sup> are obtained. Furthermore, the capacitance exhibits an outstanding cycling stability over 10,000 cycles. These superior performances together with compatible micro-fabrication process demonstrate TiN films to be suitable electrodes for MSC application. These general findings suggest great promise for improving the electrochemical properties in other material systems and represent a major advance to promote the large-scale development of miniaturized energy storage systems.</p>
energy & fuels,materials science, multidisciplinary,electrochemistry,chemistry, physical
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