Carbon contamination in scanning transmission electron microscopy and its impact on phase-plate applications

Simon Hettler,Manuel Dries,Peter Hermann,Martin Obermair,Dagmar Gerthsen,Marek Malac
DOI: https://doi.org/10.1016/j.micron.2017.02.002
IF: 2.381
Micron
Abstract:We analyze electron-beam induced carbon contamination in a transmission electron microscope. The study is performed on thin films potentially suitable as phase plates for phase-contrast transmission electron microscopy. Electron energy-loss spectroscopy and phase-plate imaging is utilized to analyze the contamination. The deposited contamination layer is identified as a graphitic carbon layer which is not prone to electrostatic charging whereas a non-conductive underlying substrate charges. Several methods that inhibit contamination are evaluated and the impact of carbon contamination on phase-plate imaging is discussed. The findings are in general interesting for scanning transmission electron microscopy applications.
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