Identifying optical microscope images of CVD-grown two-dimensional MoS 2 by convolutional neural networks and transfer learning

Cahit Perkgoz

DOI: https://doi.org/10.7717/peerj-cs.1885

2024-02-21

PeerJ Computer Science

Abstract:Background In Complementary Metal-Oxide Semiconductor (CMOS) technology, scaling down has been a key strategy to improve chip performance and reduce power losses. However, challenges such as sub-threshold leakage and gate leakage, resulting from short-channel effects, contribute to an increase in distributed static power. Two-dimensional transition metal dichalcogenides (2D TMDs) emerge as potential solutions, serving as channel materials with steep sub-threshold swings and lower power consumption. However, the production and development of these 2-dimensional materials require some time-consuming tasks. In order to employ them in different fields, including chip technology, it is crucial to ensure that their production meets the required standards of quality and uniformity; in this context, deep learning techniques show significant potential. Methods This research introduces a transfer learning-based deep convolutional neural network (CNN) to classify chemical vapor deposition (CVD) grown molybdenum disulfide (MoS 2 ) flakes based on their uniformity or the occurrence of defects affecting electronic properties. Acquiring and labeling a sufficient number of microscope images for CNN training may not be realistic. To address this challenge, artificial images were generated using Fresnel equations to pre-train the CNN. Subsequently, accuracy was improved through fine-tuning with a limited set of real images. Results The proposed transfer learning-based CNN method significantly improved all measurement metrics with respect to the ordinary CNNs. The initial CNN, trained with limited data and without transfer learning, achieved 68% average accuracy for binary classification. Through transfer learning and artificial images, the same CNN achieved 85% average accuracy, demonstrating an average increase of approximately 17%. While this study specifically focuses on MoS 2 structures, the same methodology can be extended to other 2-dimensional materials by simply incorporating their specific parameters when generating artificial images.

computer science, information systems, artificial intelligence, theory & methods