Optical constants of TiN, amorphous SiO_2, and SiN in the extreme ultraviolet range
Qais Saadeh,Vicky Philipsen,Johan Meersschaut,Venkat Sunil Kumar Channam,Karim-Alexandros Kantre,Andrey Sokolov,Bettina Kupper,Thomas Wiesner,Danilo Ocaña García,Zanyar Salami,Christian Buchholz,Frank Scholze,Victor Soltwisch
DOI: https://doi.org/10.1364/ao.542950
IF: 1.9
2024-12-11
Applied Optics
Abstract:Qais Saadeh, Vicky Philipsen, Johan Meersschaut, Venkat Sunil Kumar Channam, Karim-Alexandros Kantre, Andrey Sokolov, Bettina Kupper, Thomas Wiesner, Danilo Ocaña García, Zanyar Salami, Christian Buchholz, Frank Scholze, Victor Soltwisch Using reflectometry, we studied the optical constants of TiN and amorphous S i O _2 thin films in ... [Appl. Opt. 63, 9210-9222 (2024)]
optics