Abstract:van der Waals (vdW) layered materials have attracted much attention because their physical properties can be controlled by varying the twist angle and layer composition. However, such twisted vdW assemblies are often prepared using mechanically exfoliated monolayer flakes with unintended shapes through a time-consuming search for such materials. Here, we report the rapid and dry fabrication of twisted multilayers using chemical vapor deposition (CVD) grown transition metal chalcogenide (TMDC) monolayers. By improving the adhesion of an acrylic resin stamp to the monolayers, the single crystals of various TMDC monolayers with desired grain size and density on a SiO2/Si substrate can be efficiently picked up. The present dry transfer process demonstrates the one-step fabrication of more than 100 twisted bilayers and the sequential stacking of a twisted 10-layer MoS2 single crystal. Furthermore, we also fabricated hBN-encapsulated TMDC monolayers and various twisted bilayers including MoSe2/MoS2, MoSe2/WSe2, and MoSe2/WS2. The interlayer interaction and quality of dry-transferred, CVD-grown TMDCs were characterized by using photoluminescence (PL), cathodoluminescence (CL) spectroscopy, and cross-sectional electron microscopy. The prominent PL peaks of interlayer excitons can be observed for MoSe2/MoS2 and MoSe2/WSe2 with small twist angles at room temperature. We also found that the optical spectra were locally modulated due to nanosized bubbles, which are formed by the presence of interface carbon impurities. The present findings indicate the widely applicable potential of the present method and enable an efficient search of the emergent optical and electrical properties of TMDC-based vdW heterostructures.

Interlayer Raman modes in twisted bilayer TMDCs

Exciton fine structure in twisted transition metal dichalcogenide heterostructures

Understanding Interlayer Coupling in TMD-hBN Heterostructure by Raman Spectroscopy

Theory of interlayer exciton dynamics in 2D TMDCs Heterolayers under the influence of strain reconstruction and disorder

Raman Fingerprint of Interlayer Coupling in 2D TMDCs

Tuning Band Gaps in Twisted Bilayer MoS_2

Twistronics of Janus transition metal dichalcogenide bilayers

Tuning moiré excitons and correlated electronic states through layer degree of freedom

High-throughput dry transfer and excitonic properties of twisted bilayers based on CVD-grown transition metal dichalcogenides

Interaction of Moiré Excitons with Cavity Photons in Two-Dimensional Semiconductor Hetero-Bilayers

Strong Moiré Excitons in High-Angle Twisted Transition Metal Dichalcogenide Homobilayers with Robust Commensuration

Moiré Phonons in Twisted Bilayer MoS2

First-principles Investigation into the Heterostructures and Moiré Bilayers of Transition Metal Dichalcogenides (TMDCs)

Optically Probing the Asymmetric Interlayer Coupling in Rhombohedral-Stacked MoS2 Bilayer

Polarization and charge-separation of moiré excitons in van der Waals heterostructures

Raman‐Active Interlayer Phonons and Moiré Phonons in Twisted Thin‐Layer MoTe2

Distinct moiré trions in a twisted semiconductor homobilayer

Anomalously Enhanced Diffusivity of Moiré Excitons via Manipulating the Interplay with Correlated Electrons

Layer degree of freedom for excitons in transition metal dichalcogenides

Superposition of intra- and inter-layer excitons in twistronic MoSe$_2$/WSe$_2$ bilayers probed by resonant Raman scattering

Hybrid Moiré Excitons and Trions in Twisted MoTe2–MoSe2 Heterobilayers