Abstract:This paper proposes a ptychographic phase‐retrieval algorithm combined with a deep neural network (DNN). The proposed method allows the measurement model to be explicitly incorporated into the DNN‐based approach, improving imaging capability and robustness to changes in experimental conditions.Ptychography is a powerful computational imaging technique with microscopic imaging capability and adaptability to various specimens. To obtain an imaging result, it requires a phase‐retrieval algorithm whose performance directly determines the imaging quality. Recently, deep neural network (DNN)‐based phase retrieval has been proposed to improve the imaging quality from the ordinary model‐based iterative algorithms. However, the DNN‐based methods have some limitations because of the sensitivity to changes in experimental conditions and the difficulty of collecting enough measured specimen images for training the DNN. To overcome these limitations, a ptychographic phase‐retrieval algorithm that combines model‐based and DNN‐based approaches is proposed. This method exploits a DNN‐based denoiser to assist an iterative algorithm like ePIE in finding better reconstruction images. This combination of DNN and iterative algorithms allows the measurement model to be explicitly incorporated into the DNN‐based approach, improving its robustness to changes in experimental conditions. Furthermore, to circumvent the difficulty of collecting the training data, it is proposed that the DNN‐based denoiser be trained without using actual measured specimen images but using a formula‐driven supervised approach that systemically generates synthetic images. In experiments using simulation based on a hard X‐ray ptychographic measurement system, the imaging capability of the proposed method was evaluated by comparing it with ePIE and rPIE. These results demonstrated that the proposed method was able to reconstruct higher‐spatial‐resolution images with half the number of iterations required by ePIE and rPIE, even for data with low illumination intensity. Also, the proposed method was shown to be robust to its hyperparameters. In addition, the proposed method was applied to ptychographic datasets of a Simens star chart and ink toner particles measured at SPring‐8 BL24XU, which confirmed that it can successfully reconstruct images from measurement scans with a lower overlap ratio of the illumination regions than is required by ePIE and rPIE.

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PgNN: Physics-guided Neural Network for Fourier Ptychographic Microscopy

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Single frame phase retrieval with a deep learning method

Noise-Robust Ptychography Using Dynamic Sigmoid-Remolding

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Neural Network Model Assisted Fourier Ptychography with Zernike Aberration Recovery and Total Variation Constraint

Noise-robust latent vector reconstruction in ptychography using deep generative models