Abstract:Superconductors are used in military and commercial applications due to the full diamagnetic and zero resistance properties. Hereinto, niobium nitride (NbN) has been extensively studied for its excellent superconducting properties, such as high transition temperature (T-c), large superconducting energy gap, narrow transition width and good stability. Superconducting NbN films are widely used in low temperature superconducting devices, for instance, hot electron bolometer, superconducting quantum interference devices and rapid single flux quantum. Especially, in 2001 Gol'tsman has successfully detected a single photon response of 810 nm near-infrared using an ultra-thin superconducting NbN, which proved that the high-quality growth of ultra-thin NbN film was the key step for high resolution and sensitivity of the superconducting detector. Up to now, atomic layer deposition (ALD), molecular beam epitaxy (MBE), pulsed laser deposition (PLD) and magnetron sputtering have been successfully used to grow NbN thin films. However, T-c is decreasing gradually as the reduced of thickness. Therefore, there is still a challenge to grow ultra-thin superconducting NbN film with high performance.In this work, 5 nm thickness of superconducting epitaxial NbN film has been grown on MgO < 100 > substrate by magnetron sputtering. We systematically study the effect of different sputtering parameters on the superconductivity properties of the NbN film. The experiment results show that the high vacuum, high sputtering temperature and low working pressure are positively correlated with the superconducting transition temperature of NbN film under the premise of suitable argon-nitrogen ratio or magnetron power. The analyses of physical property measurement system (PPMS) indicate that as-grown 5 nm-thick NbN film has high performance with a superconducting transition temperature as high as 12.5 K under the optimum condition. Morphologic characterizations show that the ultra-thin NbN films have high density and smoothness with 0.116 nm of the surface roughness. Microstructural measurements also illustrate the epitaxial growth of NbN on MgO substrate. This work demonstrates the ultra-thin NbN films can be well controllably grown with high quality and offers a platform to fabricate the ultra-thin superconducting devices in the coming future.

Influence ScN protective thin layer on the superconducting properties of ultrathin NbN films

Synthesis and study of ScN thin films

Influence Of Different Sputtering Conditions On Superconductivity Of Ultra-Thin Epitaxial Niobium Nitride Film

Effect of layer thickness on structural, morphological and superconducting properties of Nb$_3$Sn films fabricated by multilayer sequential sputtering

Selective thermal evolution of native oxide layer in Nb and Nb3Sn-coated SRF grade Nb: An in-situ angular XPS study

Reduction of the thermal conductivity of the thermoelectric material ScN by Nb alloying

Study of morphological, physical and mechanical properties of thin NbN films synthesized via DC magnetron sputtering system

Controlling the Superconducting Critical Temperature and Resistance of NbN Films through Thin Film Deposition and Annealing

Substrate mediated nitridation of niobium into superconducting Nb2N thin films for phase slip study

Effect of impurities on morphology and growth mode of (111) and (001) epitaxial-like ScN films

Upper critical field and superconductor-metal transition in ultrathin niobium films

Ultrathin epitaxial NbN superconducting films with high upper critical field grown at low temperature

Properties of Nb3Sn films fabricated by magnetron sputtering from a single target

Influence of Protection Layers on Thermal Stability of Nitride Thin Films

The nontrivial effects of annealing on superconducting properties of Nb single crystals

The Effect of Thickness of Niobium Isolation Layer on Properties of Copper-Based Nb3Sn Films

The effect of niobium thin film structure on losses in superconducting circuits

Effects of High-Temperature Thermal Annealing on the Crystal Structure and Phase Separation in Sputtered ScAlN Thin Films

Influence of Nb substrate morphology and atomic structure on Sn nucleation and early Nb 3 Sn growth

Effect of thermal annealing on the average and local structure of superconducting polycrystalline NbRe films

Temperature-dependent near-surface interstitial segregation in niobium