Abstract:The ongoing development of single electron, nano and atomic scale semiconductor devices would benefit greatly from a characterization tool capable of detecting single electron charging events with high spatial resolution, at low temperature. In this work, we introduce a novel Atomic Force Microscope (AFM) instrument capable of measuring critical device dimensions, surface roughness, electrical surface potential, and ultimately the energy levels of quantum dots and single electron transistors in ultra miniaturized semiconductor devices. Characterization of nanofabricated devices with this type of instrument presents a challenge: finding the device. We therefore also present a process to efficiently find a nanometre size quantum dot buried in a $10 \times 10~\text{mm}^2$ silicon sample using a combination of optical positioning, capacitive sensors and AFM topography in vacuum.

What problem does this paper attempt to address?

### What problems does this paper attempt to solve? This paper aims to solve the problem of efficiently locating nanoscale quantum dots (QDs) in large - scale samples, especially for high - resolution, single - electron - charge - sensitive electrostatic force microscopy (EFM) measurements using an atomic force microscope (AFM) under low - temperature conditions. Specifically, the researchers developed a new type of AFM instrument that can detect single - electron charging events in ultra - miniature semiconductor devices, and by combining optical positioning, capacitive sensors and AFM topological imaging techniques, quickly find buried nanoscale quantum dots in a 10×10 mm² silicon sample. #### Main challenges: 1. **Precise positioning**: Finding a specific single - doped atom or quantum dot on a macroscopic chip is like "finding a needle in a haystack". 2. **Low - temperature operation**: Measurements need to be carried out in a low - temperature environment of 4.5 K, which poses strict requirements for instrument design. 3. **Avoiding damage**: Ensure that the sample or probe tip is not damaged during navigation and measurement. 4. **Time limit**: Since the holding time of the low - temperature Dewar flask is limited, the positioning and measurement must be completed in a short time. #### Solutions: 1. **Optical pre - positioning**: Use a long - focal - length optical stereo microscope to observe the sample and the cantilever simultaneously from two orthogonal directions to ensure that the sample is aligned with the probe tip. 2. **Capacitive position sensor**: Developed a high - precision capacitive position sensor for real - time monitoring of the sample's position in the x, y, and z directions. 3. **Step - by - step scanning strategy**: Adopt a long - distance scanning mode, use electrostatic interactions to quickly identify large features such as metal markers and etched grooves, and thus safely approach the target area. 4. **Temperature control**: Designed a sample holder with electrical connections and temperature control to ensure the stability and repeatability of the sample at different temperatures. Through these methods, the researchers have successfully achieved the goal of efficiently and safely finding and characterizing nanoscale quantum dots in a complex environment.

Needle in a haystack: efficiently finding atomically defined quantum dots for electrostatic force microscopy

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