Abstract:Despite the superiority in quantum properties, self-assembled semiconductor quantum dots face challenges in terms of scalable device integration because of their random growth positions, originating from the Stranski-Krastanov growth mode. Even with existing site-controlled growth techniques, for example, nanohole or buried stressor concepts, a further lithography and etching step with high spatial alignment requirements isnecessary to accurately integrate QDs into the nanophotonic devices. Here, we report on the fabrication and characterization of strain-induced site-controlled microcavities where site-controlled quantum dots are positioned at the antinode of the optical mode field in a self-aligned manner without the need of any further nano-processing. We show that the Q-factor, mode volume, height, and the ellipticity of site-controlled microcavities can be tailored by the size of an integrated AlAs/Al2O3 buried stressor, with an opening ranging from 1 to 4 $\mu$m. Lasing signatures, including super-linear input-output response, linewidth narrowing near threshold, and gain competition above threshold, are observed for a 3.6-$\mu$m self-aligned cavity with a Q-factor of 18000. Furthermore, by waiving the rather complex lateral nano-structuring usually performed during the fabrication process of micropillar lasers and vertical-cavity surface emitting lasers, quasi-planar site-controlled cavities exhibit no detrimental effects of excitation power induced heating and thermal rollover. Our straightforward deterministic nanofabrication concept of high-quality quantum dot microcavities integrates seamlessly with the industrial-matured manufacturing process and the buried-stressor techniques, paving the way for exceptional scalability and straightforward manufacturing of high-\b{eta} microlasers and bright quantum light sources.

A lithographically-defined quantum dot with sub-wavelength confinement of light

Ultra-Low Threshold Lasing In A Quantum Dot Microdisk Cavity

Tuning Quantum Dot States with Optical Fields

Controlled light-matter coupling for a single quantum dot embedded in a pillar microcavity using far-field optical lithography

A gated quantum dot strongly coupled to an optical microcavity

Self-aligned photonic defect microcavities with site-controlled quantum dots

Lasing by Template‐Assisted Self‐Assembled Quantum Dots

Nanometer-scale photon confinement in topology-optimized dielectric cavities

Direct-write projection lithography of quantum dot micropillar single photon sources

Quantum Dots and Their Potential Applications to Device Fabrication

Solid-state quantum optics with quantum dots in photonic nanostructures

Cavity-mediated coherent coupling between distant quantum dots

Coupled vertical double quantum dots at single-hole occupancy

A hemispherical, high-solid-angle optical micro-cavity for cavity-QED studies

Near Transform-Limited Quantum Dot Linewidths in a Broadband Photonic Crystal Waveguide

A Highly Tunable Lateral Quantum Dot Realized in Ingaas/Inp by an Etching Technique

A two-dimensional array of single-hole quantum dots

Control of Quantized Spontaneous Emission from Single GaAs Quantum Dots Embedded in Huygens' Metasurfaces

High-performance deterministic in situ electron-beam lithography enabled by cathodoluminescence spectroscopy

A unipolar quantum dot diode structure for advanced quantum light sources

Three-dimensional Photonic-Crystal Cavity with an Embedded Quantum Dot As a Nonclassical Light Emitter.