Abstract:Despite the superiority in quantum properties, self-assembled semiconductor quantum dots face challenges in terms of scalable device integration because of their random growth positions, originating from the Stranski-Krastanov growth mode. Even with existing site-controlled growth techniques, for example, nanohole or buried stressor concepts, a further lithography and etching step with high spatial alignment requirements isnecessary to accurately integrate QDs into the nanophotonic devices. Here, we report on the fabrication and characterization of strain-induced site-controlled microcavities where site-controlled quantum dots are positioned at the antinode of the optical mode field in a self-aligned manner without the need of any further nano-processing. We show that the Q-factor, mode volume, height, and the ellipticity of site-controlled microcavities can be tailored by the size of an integrated AlAs/Al2O3 buried stressor, with an opening ranging from 1 to 4 $\mu$m. Lasing signatures, including super-linear input-output response, linewidth narrowing near threshold, and gain competition above threshold, are observed for a 3.6-$\mu$m self-aligned cavity with a Q-factor of 18000. Furthermore, by waiving the rather complex lateral nano-structuring usually performed during the fabrication process of micropillar lasers and vertical-cavity surface emitting lasers, quasi-planar site-controlled cavities exhibit no detrimental effects of excitation power induced heating and thermal rollover. Our straightforward deterministic nanofabrication concept of high-quality quantum dot microcavities integrates seamlessly with the industrial-matured manufacturing process and the buried-stressor techniques, paving the way for exceptional scalability and straightforward manufacturing of high-\b{eta} microlasers and bright quantum light sources.

Controlled light-matter coupling for a single quantum dot embedded in a pillar microcavity using far-field optical lithography

Tuning Quantum Dot States with Optical Fields

Deterministic assembly of a charged quantum dot-micropillar cavity device

A lithographically-defined quantum dot with sub-wavelength confinement of light

Direct-write projection lithography of quantum dot micropillar single photon sources

Quantum State Control in Single Quantum Dots and the Coupling with Photonic Crystal Cavities (conference Presentation)

A gated quantum dot strongly coupled to an optical microcavity

Independent electrical control of two quantum dots coupled through a photonic-crystal waveguide

Controlled Coherent Coupling in a Quantum Dot Molecule Revealed by Ultrafast Four-Wave Mixing Spectroscopy

Polarization dependent light-matter coupling and highly indistinguishable resonance fluorescence photons from quantum dot-micropillar cavities with elliptical cross-section

Self-aligned photonic defect microcavities with site-controlled quantum dots

Cavity-mediated coherent coupling between distant quantum dots

Strain Spectrally-Tunable Single-Photon Source Based on a Quantum Dot in Microcavity (conference Presentation)

Control of Quantized Spontaneous Emission from Single GaAs Quantum Dots Embedded in Huygens' Metasurfaces

Selective Enhancement of Photon Emission in a Quantum Dot Coupling with Micropillar Cavity

{\it In-situ} Laser Microprocessing at the Quantum Level

Highly Indistinguishable On-Demand Resonance Fluorescence Photons from a Deterministic Quantum Dot Micropillar Device with 74% Extraction Efficiency.

Lasing by Template‐Assisted Self‐Assembled Quantum Dots

Coupling Quantum Tunneling with Cavity Photons

Purcell-enhanced single-photon emission from InAs/GaAs quantum dots coupled to broadband cylindrical nanocavities

Optical positioning of single quantum dots in micropillar with >65% extraction efficiency for on-demand quantum light sources