Differential deposition applied to x-ray mirror substrate

Patrice Bras,Sylvain Labouré,Amparo Vivo,François Perrin,Christian Morawe
DOI: https://doi.org/10.1117/12.2665823
2023-12-04
Abstract:The process of differential deposition is currently applied at the ESRF in order to correct figure errors of x-ray optics substrates, prior to multilayer deposition. The substrate is moved at a controlled speed in front of a sputtering source to precisely control the deposition profile. This work will describe the concept of differential deposition at the ESRF as well as recent results of its implementation to correct a real mirror substrate surface. Finally, initial studies using a synchrotron beamline characterization technique based on x-ray total reflection are presented.
Applied Physics
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