Abstract:Lithium niobate, with its wide applications in optics and mechanics, is a chemically inert material, and fabrication techniques for microscale and nanoscale structures of lithium niobate are to be developed. In this report, we demonstrate fabricating high-quality lithium niobate microdisk resonators and nanobeam photonic crystal cavities, using electron beam lithography and ion milling. Our devices exhibit high optical quality (Q) factors, paving the way for cavity nonlinear optics and cavity opto-mechanics of lithium niobate. Summary of Research: Lithium niobate, LiNbO3, with its large optical nonlinearities, wide transparency window, high optical damage threshold, and high mechanical stiffness, has been widely studied in the fields of optics and mechanics for decades. Recently, LiNbO3 on insulator thin film wafers are available, giving us opportunities to study optical, mechanical and electrical properties of LiNbO3 in the microscale. However, since LiNbO3 does not efficiently react with commonly used etching chemicals, its fabrication is nontrivial. A variety of fabrication techniques have been explored to make optical waveguides or resonators with LiNbO3, including titanium diffusion [1], hybrid waveguiding [24], machining [5], laser writing [6], and direct ion etching [710]. Direct ion etching, which uses standard electron beam lithography and ion milling, is potentially capable of defining microscale and nanoscale lithium niobate structures with high optical confinement and small footprints, and thus is selected by us to fabricate microdisk resonators and nanobeam photonic crystal cavities. Our devices show high optical qualities (Q > 106 for microdisk resonators and Q > 105 for nanobeam photonic crystal cavities), and are promising for onchip nonlinear optics, quantum photonics, and optomechanics. Figure 1: (a) A scanning electron microscopy picture, and (b) a telecom-band cavity resonance and its Lorentzian fitting, of a typical fabricated lithium niobate microdisk resonator. (See cover!) Figure 2: (a) (b) SEM pictures, and (c) broadband transmission spectrum, of a typical fabricated lithium niobate nanobeam photonic crystal cavity. Insets: zoom-in cavity resonances and Lorentzian fittings.

Picosecond cubic and quintic nonlinearity of lithium niobate at 532 nm

Strong Nonlinear Optics In On-Chip Coupled Lithium Niobate Microdisk Photonic Molecules

Strong Nonlinear Optics In On-Chip Lithium Niobate Photonic Molecules Fabricated By Femtosecond Laser

Highly-efficient second and third harmonic generation in a monocrystalline lithium niobate microresonator.

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Picosecond Z-scan Study of Bound Electronic Kerr Effect in LiNbO3 Crystal Associated with Two-Photon Absorption

A Z-Scan Study of LiNbO3 Thin Films

Nonlinear optical properties of lithium niobate crystals doped with alkaline earth and rare earth elements

Resonant Nonlinear Nanostructured Grating in an Unstructured Lithium Niobate on Insulator Platform

Enhanced Second-Harmonic Generation in Thin-Film Lithium Niobate Circular Bragg Nanocavity

Second-harmonic generation in periodically-poled thin film lithium niobate wafer-bonded on silicon

Nonlinear Optical Oscillation Dynamics in High-Q Lithium Niobate Microresonators.

Nonlinear wave mixing in lithium niobate thin film

Nonlinear THz Generation through Optical Rectification Enhanced by Phonon–Polaritons in Lithium Niobate Thin Films

Efficient second-harmonic generation of quasi-bound states in the continuum in lithium niobate thin film enhanced by Bloch surface waves

Nonlinearity Modulated Structure in a Type-Ii Lithium Niobate Waveguide by Femtosecond Laser Direct Writing

Resonant enhancement of second harmonic generation in etchless thin film lithium niobate heteronanostructure

Lithium Niobate MicroStructures CNF Project Number : 1997-11 Principal Investigator

Nonlinear Frequency Conversion in Lithium Niobate Thin Films

Ultrafast and large third-order optical nonlinearity of porous nanosized poly-crystal LiNbO3 film