Abstract:Photolithography is the foundational process at the root of micro-electromechanical (MEMS) and microfluidic systems manufacture. The process is descendant from the semiconductor industry, originating from printed circuit board and microprocessor fabrication, itself historically performed in a cleanroom environment utilizing expensive, specialist microfabrication equipment. Consequently, these conditions prove cost-prohibitive and pose a large barrier to entry. We present a novel homebrew, "do-it-yourself" method for performing photolithography to produce master mold wafers using only household appliances and homemade equipment at the bench side, outside of a cleanroom, producing a range of designs including spiral, serpentine, rectangular, and circulatory. Our homebrew processes result in the production of microfluidic channels with feature resolution of ∼85 μm width and 50 μm height utilizing inkjet-printed photomasks on transparency film to expose dry-film photoresist. From start to finish, the entire process takes under <90 min and costs <£300. With SU8 epoxy negative photoresist and a chrome photomask, our low-cost UV exposure apparatus and homemade spincoater could be used to produce PDMS devices containing large arrays of identical microwells measuring 4.4 μm in diameter. We show that our homebrew method produces both rectangular and spiral microfluidic channels with better results than can be achieved by SLA 3D printing by comparison, and amenable to bonding into multilayer functional microfluidic devices. As these methods are fundamental to microfluidics manufacture, we envision that this work will be of value to researchers across a broad range of disciplines, such as those working in resource-constrained countries or conditions, with many and widely varying applications.

Inexpensive Benchtop Soft Photolithography Technique for Microfluidics and Other Applications

Rapid Prototyping of Soft Lithography Masters for Microfluidic Devices Using Dry Film Photoresist in a Non-Cleanroom Setting

Homebrew Photolithography for the Rapid and Low-Cost, "Do It Yourself" Prototyping of Microfluidic Devices

An Alternative Micro-Milling Fabrication Process for Rapid and Low-Cost Microfluidics

A Low-Cost, Disposable and Portable Inkjet-Printed Biochip for the Developing World

Low-cost fluorescence microscope with microfluidic device fabrication for optofluidic applications

Fabrication of Micro/Nanofluidic Chip on Glass Substrate and Its Application for Electrokinetic Concentration of Proteins

A facile and low-cost micro fabrication material: flash foam

Fabrication of 1-d nanochannels on PMMA substrate by photoresist-free uv lithography and UV-assisted bonding under low temperature

Inexpensive and rapid fabrication of PDMS microfluidic devices for biological testing applications using low cost commercially available 3D printers

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“A Low-Cost Microfluidics System for Light Microscopy Experiments”

Breaking the clean room barrier: exploring low-cost alternatives for microfluidic devices

Investigation of the maskless lithography technique for the rapid and cost-effective prototyping of microfluidic devices in laboratories

Soft tubular microfluidics for 2D and 3D applications

Making Healthcare Accessible: A Rapid Clean-Room-Free Fabrication Strategy for Microfluidics-Driven Biosensors Based on Coupling Stereolithography and Hot Embossing

A Low-Cost Method of Fabricating Hybrid Micro-Nano Fluidic Chip by Double-Layer PDMS Mold and UV–thermal Nanoimprinting

Low-Cost Fabrication Strategies of Microfluidic Device on Glass Substrate

How to Fabricate Robust Microfluidic Systems for a Dollar

Fabrication of Microfluidic Systems in Poly(dimethylsiloxane)

Low-cost, high-throughput fabrication of cloth-based microfluidic devices using a photolithographical patterning technique.