Abstract:Phase retrieval (PR) technology can reconstruct the complex amplitude information of the entrance pupil surface from the captured defocus intensity images, and has been successfully applied in many scientific fields such as astronomical observation, biomedical imaging and digital signal restoration. For low numerical aperture (NA) optical systems, the point spread function (PSF) can be calculated using the Fresnel diffraction propagation theory based on Fourier transform, ignoring the polarization field of the light field. However, for high-NA systems, the focal spot not only includes the transverse component, but also the longitudinal component accounts for a proportion that cannot be ignored, thus necessitating a vector model when calculating the PSF in the non-paraxial region. In this paper, the vector diffraction calculation model with arbitrary defocus distance based on the extended Nijboer-Zernike (ENZ) theory is established, which can characterize the light field components in three directions under the Cartesian coordinate system. What's more, a modified Gauss-Newton theory is innovatively applied to the axial phase difference PR model. Compared with the traditional first-order algorithm, the second-order algorithm can reduce the number of iterations. In addition, so as to verify the effectiveness of the proposed method, numerical simulations matching the physical model are carried out, the results show that the proposed method can accurately reconstruction the wavefront with high robustness. In conclusion, the established vector PR model in this paper would provide a creatively guidance for wavefront measurement of high-NA optical systems that is significant in the fields of semiconductor lithography, micro imaging and micro manipulation.

Phase front retrieval and correction of Bessel beams

Alleviating Image Artifacts in Wavefront Coding Extended Depth of Field Imaging System

Modal-based Adaptive Autofocusing Phase Retrieval for Wavefront Measurement

The aberration correction of high-order Bessel-Gaussian beams

Modal-based Nonlinear Optimization Algorithm for Wavefront Measurement with Under-Sampled Data.

Application of Vector Phase Retrieval Model in High Numerical Aperture Optical Systems

Quantitative Phase Imaging Based on Wavefront Correction of a Digital Micromirror Device

Aberration Correction for SLM-generated Bessel Beams Propagating Through Tilted Interfaces

Correction of Aberration-Induced Phase Errors in Phase Measuring Deflectometry

Small-phase Retrieval Using Single Focused Far-Field Intensity

A Method of Laser Wavefront Aberration Compensation Using Optical Phase Conjugation and Its Simulating Experiment

Differential Phase Retrieval Based on Phase Modulating for Wavefront Detection

Bayesian Optimization for Wavefront Sensing and Error Correction

End-to-end simulations of photonic phase correctors for adaptive optics systems

Collimating three-axicon zoom system for interferometric Bessel beam side lobe cancellation

Diffraction-free Distance Enhancement of Bessel Beams Based on Spatial Domain Phase Modulation

S-shaped Non-Paraxial Corrections to General Astigmatic Beams.

Orientation Dependent Wavefront Correction System under Grazing Incidence

Identification and Adaptive Control of a High-Contrast Focal Plane Wavefront Correction System

Engineering The On-Axis Intensity Of Bessel Beam By A Feedback Tuning Loop

Shaping the On-Axis Intensity Profile of Generalized Bessel Beams by Iterative Optimization Methods