Abstract:Interfacing electronics with optical fiber networks is key to the long-distance transfer of classical and quantum information. Piezo-optomechanical transducers enable such interfaces by using GHz-frequency acoustic vibrations as mediators for converting microwave photons to optical photons via the combination of optomechanical and piezoelectric interactions. However, despite successful demonstrations, efficient piezo-optomechanical transduction remains out of reach due to the challenges associated with hybrid material integration and increased loss from piezoelectric materials when operating in the quantum regime. Here, we demonstrate an alternative approach in which we actuate 5-GHz phonons in a conventional silicon-on-insulator platform. In our experiment, microwave photons resonantly drive a phononic crystal oscillator via the electrostatic force realized in a charge-biased narrow-gap capacitor. The mechanical vibrations are subsequently transferred via a phonon waveguide to an optomechanical cavity, where they transform into optical photons in the sideband of a pump laser field. Operating at room temperature and atmospheric pressure, we measure a microwave-to-optical photon conversion efficiency of $1.8 \times 10^{-7}$ in a 3.3 MHz bandwidth, and demonstrate efficient phase modulation with a half-wave voltage of $V_\pi = 750 $ mV. Our results mark a stepping stone towards quantum transduction with integrated devices made from crystalline silicon, which promise efficient high-bandwidth operation, and integration with superconducting qubits. Additionally, the lack of need for piezoelectricity or other intrinsic nonlinearities makes our approach adaptable to a wide range of materials for potential applications beyond quantum technologies.

Electrostatic actuation of silicon optomechanical resonators

A Dissipative Self-Sustained Optomechanical Resonator on a Silicon Chip

Discussion on the optical-coupling in silicon optical-type micromechanical sensors

The Optical Excitation of Silicon Microresonator

An opto-electro-mechanical system based on evanescently-coupled optical microbottle and electromechanical resonator

Sideband-resolved resonator electromechanics on the single-photon level based on a nonlinear Josephson inductance

Optomechanical transduction of an integrated silicon cantilever probe using a microdisk resonator

A microelectromechanically controlled cavity optomechanical sensing system

Actuation of Micro-Optomechanical Systems Via Cavity-Enhanced Optical Dipole Forces

Gigahertz Nano-Optomechanical Resonances in a Dielectric SiC-Membrane Metasurface Array

Micromanipulation transfer of membrane resonators for circuit optomechanics

Room temperature, cavity-free capacitive strong coupling to mechanical motion

Electrostatic-excited Silicon unitized micromechanical resonator

Optomechanical Sensing with On-Chip Microcavities

Electro-optic transduction in silicon via GHz-frequency nanomechanics

Silicon Double-Disk Optomechanical Resonators from Wafer-Scale Double-Layered Silicon-on-Insulator

Cavity optomechanics on a microfluidic resonator with water and viscous liquids

A hybrid on-chip optomechanical transducer for ultrasensitive force measurements

Force Sensing with an Optomechanical Self-Oscillator

A Silicon Electromechanical Photodetector

Radiation-Pressure-Antidamping Enhanced Optomechanical Spring Sensing