Abstract:Superconductor digital electronics using Josephson junctions as ultrafast switches and magnetic-flux encoding of information was proposed over 30 years ago as a sub-terahertz clock frequency alternative to semiconductor electronics based on complementary metal-oxide-semiconductor (CMOS) transistors. Recently, interest in developing superconductor electronics has been renewed due to a search for energy saving solutions in applications related to high-performance computing. The current state of superconductor electronics and fabrication processes are reviewed in order to evaluate whether this electronics is scalable to a very large scale integration (VLSI) required to achieve computation complexities comparable to CMOS processors. A fully planarized process at MIT Lincoln Laboratory, perhaps the most advanced process developed so far for superconductor electronics, is used as an example. The process has nine superconducting layers: eight Nb wiring layers with the minimum feature size of 350 nm, and a thin superconducting layer for making compact high-kinetic-inductance bias inductors. All circuit layers are fully planarized using chemical mechanical planarization (CMP) of SiO2 interlayer dielectric. The physical limitations imposed on the circuit density by Josephson junctions, circuit inductors, shunt and bias resistors, etc., are discussed. Energy dissipation in superconducting circuits is also reviewed in order to estimate whether this technology, which requires cryogenic refrigeration, can be energy efficient. Fabrication process development required for increasing the density of superconductor digital circuits by a factor of ten and achieving densities above 10^7 Josephson junctions per cm^2 is described.

Electrical Properties of Selective-Area-Grown Superconductor-Semiconductor Hybrid Structures on Silicon

Development of a Nb-based semiconductor-superconductor hybrid platform

Sn/InAs Josephson junctions on selective area grown nanowires with in-situ shadowed superconductor evaporation

Electrical Control of the Superconducting-to-Insulating Transition in Graphene/Metal Hybrids

Universal Platform for Scalable Semiconductor‐Superconductor Nanowire Networks

Anodic oxidation of epitaxial superconductor-semiconductor hybrids

Large-scale on-chip integration of gate-voltage addressable hybrid superconductor-semiconductor quantum wells field effect nano-switch arrays

Supercurrent, Multiple Andreev Reflections and Shapiro Steps in InAs Nanosheet Josephson Junctions

Hybrid High-Temperature-Superconductor-Semiconductor Tunnel Diode

Shadow epitaxy for in-situ growth of generic semiconductor/superconductor devices

InAs on Insulator: A New Platform for Cryogenic Hybrid Superconducting Electronics

Electronic conduction and superconducting properties of CoSi$_2$ films on silicon--an unconventional superconductor with technological potential

Epitaxial superconductor-semiconductor two-dimensional systems for superconducting quantum circuits

Gate-Tunable Transmon Using Selective-Area-Grown Superconductor-Semiconductor Hybrid Structures on Silicon

Nonsinusoidal current-phase relations in semiconductor-superconductor-ferromagnetic insulator devices

From nonreciprocal to charge-4e supercurrents in Ge-based Josephson devices with tunable harmonic content

Sn/InAs Josephson Junctions on Selective Area Grown Nanowires with in Situ Shadowed Superconductor Evaporation

Tuning supercurrent in Josephson field effect transistors using h-BN dielectric

Al–Ge–Al Nanowire Heterostructure: From Single‐Hole Quantum Dot to Josephson Effect

Coherent transport in Nb/delta-doped-GaAs hybrid microstructures

Superconductor Digital Electronics: Scalability and Energy Efficiency Issues