Abstract:With the advancement of micro/nanotechnology, precise control of the interaction between light and matter at the micro/nanoscale is crucial for successful material processing and surface functionalization. Ultrafast lasers with ultra-short pulses have gained attention due to their high spatial resolution and low thermal damage, enabling extremely smooth and precise machining on various metal surfaces. At the same time, shorter pulse nanosecond lasers, which have a wider application range, strike a balance between achieving high-precision microfabrication and mitigating adverse thermal effects caused by millisecond lasers. By adjusting laser processing parameters, it is possible to create large-scale micro/nanostructures with complex shapes, delicate textures, and special functionalities, applicable in fields such as optics, electronics, and biomedicine. Short/ultrafast pulse laser fabrication technology opens up more possibilities and prospects for the realization of diverse functional micro/nanostructures. This comprehensive review provides an overview of the interaction mechanisms between short/ultra-short-pulse laser micro/nanoprocessing and materials. By integrating theoretical models such as the two-temperature model and the Drude–Lorentz model, along with comprehensive numerical simulation methods, a brief summary of the ablation behavior of metal surfaces under short/ultra-short-pulse lasers is provided. Furthermore, we delve into the controllability of microstructures, laser-induced periodic surface structures at the nanoscale, and other types of nanostructures under different processing conditions. Thorough analysis and discussion are conducted from multiple perspectives, including surface topography and functional impacts. Subsequently, the focus shifts to the functionalization of metal surfaces with micro/nanostructures, and an in-depth investigation and review are conducted in areas such as surface wettability, bio-inspired surfaces, optical diffraction, and advanced biomedicine. Finally, the advantages and limitations of laser texturing processing techniques are discussed, and the future development of functionalized metal surfaces is anticipated.

Numerical study of laser micro- and nano-processing of nanocomposite porous materials

Modeling of Short-Pulse Laser Interactions with Monolithic and Porous Silicon Targets with an Atomistic-Continuum Approach

Study for Laser Controlled Fabrication of Micro/Nano-Structures of Silicon Based on Multi-Physics Model

Numerical Simulation and Validation of Multiscale 3D Laser Spiral Machining of Microholes

Numerical investigation of heat transfer in ultrafast laser processing of silicon material

Effects of Laser Fluence on Near-Field Surface Nanostructuring

Nanosecond pulsed laser ablation of silicon—finite element simulation and experimental validation

Micro/nanoengineering of functionalized metal surfaces based on short/ultra-short-pulsed lasers: a review

Numerical simulation and experimental analysis on nanosecond laser ablation of titanium alloy

Numerical Investigation of the Kinetics of Non-Equilibrium Phase Transitions in Silicon Induced by an Ultra-Short Laser Pulse

Investigation of femtosecond laser assisted nano and microscale modifications in lithium niobate

Micro- and Nanoscale Heat Transfer in Femtosecond Laser Processing of Metals

Fabrication of Nanostructures by Laser Optical Focusing

Numerical Investigation on Laser-Produced Microstructure of Metal under Non-Melting Condition

Processing Microstructure on Film by Femtosecond Laser

Deposition and Melting Behaviors for Formation of Micro/nano Structures from Nanostructures with Femtosecond Pulses

Computational and Experimental Study of Nanosecond Laser Ablation of Crystalline Silicon

Numerical simulation and experimental study on laser micromachining of 304L stainless steel in ambient air

Thermo-elasto-plastic simulations of femtosecond laser-induced multiple-cavity in fused silica

Mechanisms and Applications of Femtosecond Laser Induced Nanostructures

Efficient absorption of laser light by nano-porous materials with well-controlled structure