Abstract:Large-size diffraction gratings are essential for pulse compressors in chirped-pulse-amplified high-power laser systems, spectroscopic telescopes, etc. Fabricating large gratings requires large-aperture laser beams with collimated and aberration-free wavefronts. As an alternative a method of making monolithic gratings by optical mosaic has been proposed, which makes multiple-exposures in different areas of a substrate to enlarge the grating size. Between exposures the position and attitude of substrate must be adjusted to minimize the overall wavefront errors, with very tight accuracy requirements (similar to dozens of nanometers and tenths of micro-radians, respectively).We fully utilize the latent fringes (exposed but undeveloped fringes in photoresist) as the core reference object and the exposure beams as the adjustment beams to adjust and lock the position and attitude between consecutive exposures. This approach greatly simplifies the alignment system and eliminates many system errors. However, the diffraction efficiency of a latent grating is extremely weak (similar to 10(-5)) and excessive exposure of the latent fringes during the position and attitude adjustment should be avoided. We overcome these difficulties by carefully blocking stray lights and using a high-sensitivity CCD to monitor the interference fringes of the -1st- and 0th-order latent-fringe diffracted wavefronts. Experimentally we have made 2 x 2 mosaics of (60+28) x (53+30) mm(2) grating area. Typical peak-valley and root-mean-square values of the measured -1st-order diffraction wavefront errors are 0.06 lambda and 0.01 lambda, respectively.The mosaic conditions, detailed alignment steps, and experimental results showing position and attitude controllability will be presented. Important issues of extending the present work to large-size (possibly sub-meter) fabrication will also be discussed.

Demonstration of synergic Fresnel and Fraunhofer diffraction for application to micrograting fabrication

Experimental and Theoretical Investigation of Macro-Periodic and Micro-Random Nanostructures with Simultaneously Spatial Translational Symmetry and Long-Range Order Breaking

Demonstration of a PDMS based hybrid grating and Fresnel lens (G-Fresnel) device

Microfiber and Nanofiber Optics: Principles and Applications

Light pattern generation with hybrid refractive microoptics under Gaussian beam illumination

Demonstrating and Optimizing the Dual Dispersion and Focusing Functionality of Grating-Fresnel Lens

Design and Demonstration of a New Kind of Aperture for Getting Expected Diffraction Patterns.

Fabrication of Optical Mosaic Gratings by Consecutive Holographic Exposures Employing A Latent-Fringe Based Alignment Technique

Design and Fabrication of Diffractive Microlens and Analysis of Optical Characteristics

Fabrication of Large Grating by Monitoring the Latent Fringe Pattern

A Review: Laser Interference Lithography for Diffraction Gratings and Their Applications in Encoders and Spectrometers

Interference Lithography Based on a Phase Mask for the Fabrication of Diffraction Gratings

Fresnel diffraction lithography

Subwavelength focusing of micro grating-Fresnel lens

Proposal and Demonstration of a Spectrometer Using a Diffractive Optical Element with Dual Dispersion and Focusing Functionality

Fabrication Of Grating-Fresnel Lens By Using Pdms Based Soft Lithography

Theoretical Analysis of Diffraction Imaging in Fourier Ptychography Microscopy

Single- and multi-layer micro-scale diffractive lens fabrication for fiber imaging probes with versatile depth-of-field

Diffractive Optics Experimental System Based on Spatial Light Modulator and CCD

Hybrid microlens array/grating fabrication based on microfluidic system and its application in the enhancement of spectral resolution

Design and Fabrication of a Variable-Line-space Grating Surface for a Fresnel-grating Lens Based Miniature Spectrometer