Abstract:When light hits the interface between media characterized by different refractive indices, a fraction is reflected: see Figure 1(a). This imposes severe limits on many optoelectronic devices such as solar cells1 and LEDs.2 A range of techniques to reduce reflection have been proposed and developed. For example, a quarter-wavelength transparent layer is typically used as an antireflection coating in solar cells. However, this technique only works for specific wavelengths. Since solar energy covers a wide range of wavelengths, a broadband method is favored. With graded refractive-index layers, light only experiences a gradual change of the refractive index instead of hitting a sharp interface—see Figure 1(c)—and reflection can be greatly reduced for a large range of wavelengths and angles of incidence. Several techniques have been developed to fabricate these layers.3, 4 However, many involve complicated processes or work only for certain materials. We have developed a simple, low-temperature, integratedcircuit-compatible fabrication process. To date, it has thus far only been demonstrated on crystalline5 and hydrogenated amorphous silicon (a-Si:H),6 but it can in principle be applied to other materials as well. A monolayer of silica nanoparticles is first formed on the surface of a sample with an amorphoussilicon thin film on top: see Figures 1(d) and 1(e). The sample is then placed into the reactive-ion etcher (RIE), with the nanoparticles serving as a mask for etching. Either nanowire or nanocone arrays—Figures 1(f) and 1(g), respectively—can be obtained, depending on etching conditions. We used three samples to evaluate the antireflection effect (see Figure 2). A 1μm-thick a-Si:H thin film was deposited onto each, while a monolayer of silica nanoparticles was preformed on the second and third samples. After RIE etching, nanowire and nanocone arrays were formed on the second and third samples, respectively. The thin-film sample had a highly reflective, Figure 1. Effective refractive-index profiles of the interface between air and (a) hydrogenated amorphous-silicon (a-Si:H) thin film, (b) 600nm a-Si:H nanowire (NW) arrays, and (c) 600nm a-Si:H nanocone (NC) arrays. (d)–(g) Schematic illustrations of 1μm-thick a-Si:H on indium tin oxide (ITO)-coated glass substrate, a monolayer of silica (SiO2) nanoparticles on top of a-Si:H thin film, and arrays of NWs and NCs.

Silica-Silicon Composites for Near-Infrared Reflection: A Comprehensive Computational and Experimental Study

Enhanced Reflection from Arrays of Silicon Based Inverted Nanocones

Tuning the peak position of subwavelength silica nanosphere broadband antireflection coatings.

Durable Broadband and Omnidirectional Ultra-antireflective Surfaces

Near-infrared Optical Characteristics of Composite Ag-porous Si Dielectric Film for Solar Devices

Silicon-Enhanced Nanocavity: From Narrow Band Color Reflector to Broadband Near-Infrared Absorber

Broadband Mid-Infrared Antireflection Metasurfaces Based on Silicon

Enhanced Reflection from Inverse Tapered Nanocone Arrays

Multi-scale Micro-Nano Structures Prepared by Laser Cleaning Assisted Laser Ablation for Broadband Ultralow Reflectivity Silicon Surfaces in Ambient Air

Bioinspired Silica Surfaces with Near-Infrared Improved Transmittance and Superhydrophobicity by Colloidal Lithography.

High Transparent Mid-Infrared Silicon "window" Decorated with Amorphous Photonic Structures Fabricated by Facile Phase Separation

Designing multifunctional silica coatings for enhanced broadband antireflection and microfiber contamination sensing

Direct Laser Writing of Silica Nanoparticle Nanocomposites: Probing Mechanical Reinforcement and Understanding Structural Color from Design Parameters

An Ultrathin Transparent Radiative Cooling Photonic Structure with a High NIR Reflection

In silico design of metal-dielectric nanocomposites for solar energy applications

Nano-Structured Silicon: Fabrication, Optical Property, Defect States and Device Application

Passive Radiative Cooling of Silicon Solar Modules with Photonic Silica Microcylinders

Efficient electromagnetic wave absorption by SiC/Ni/NiO/C nanocomposites

Enhanced Sic/Nfg/Ni Ternary Composite Microwave Absorbing Materials with Micro-Network Structures Produced by Selective Laser Sintering

Nanocones As Antireflection Coating

Broadband antireflection enhancement of c-Si solar cells by less 1/10 wavelength and subwavelength of silica nanosphere coatings