Abstract:A seamless chip-to-world photonic interface enables wide-ranging advancements in optical ranging, display, communication, computation, imaging, and light-matter interaction. An optimal solution allows for 2D scanning of a diffraction-limited beam from anywhere on a photonic chip over a large number of beam-spots in free-space. Currently, devices with direct PIC integration rely on tiled apertures with poor mode qualities, large footprints, and complex control systems. Micro-mechanical beam scanners have good beam quality but lack direct PIC integration and are inertially-limited due to the use of bulk optical components or structures in which the optical aperture and actuator sizes are inextricably linked, resulting in trade-offs among resolution, speed, and footprint. Here, we overcome these limitations with the photonic "ski-jump": a nanoscale optical waveguide monolithically integrated atop a piezoelectrically actuated cantilever which passively curls ~90$^{\circ}$ out-of-plane in a footprint of <0.1 mm$^{2}$, emits sub-micron diffraction-limited optical modes, and exhibits kHz-rate mechanical resonances with quality factors exceeding 10,000. This enables two-dimensional beam-scanning with footprint-adjusted spot-rates of 68.6 mega-spots/(s$\cdot$mm$^{2}$) at CMOS-level voltages, which is equivalent to a 1 megapixel display at 100 Hz from a 1.5 mm$^{2}$ footprint, and exceeds the performance of state-of-the-art MEMS mirrors by >50$\times$. Using this device, we demonstrate image projection, video projection, and the initialization and readout of single photons from silicon vacancy centers in diamond waveguides. Based on current performance, we identify pathways for achieving >1 giga-spots at kHz-rates in a ~1 cm$^{2}$ area to provide a seamless, scalable optical pipeline between integrated photonic processors and the free-space world.

Two-dimensional extreme skin depth engineering for CMOS photonics

Photonic skin-depth engineering

Exceptional coupling in extreme skin-depth waveguides for extremely low waveguide crosstalk

Interlayer Slope Waveguide Coupler for Multilayer Chalcogenide Photonics

Ultralow-loss Waveguide Crossing for Photonic Integrated Circuits by Using Inverted Tapers

Low-loss skimming waveguides with controllable mode leakage for on-chip saturable absorbers

Methods for extending working distance using modified photonic crystal for near-field lithography

Crosstalk Prohibition at the Deep-Subwavelength Scale by Epsilon-Near-zero Claddings

Waveguide-to-substrate, vertical bend coupler design for 3D photonic integrated circuits

Asymmetric bi-level dual-core mode converter for high-efficiency and polarization-insensitive O-band fiber-chip edge coupling: breaking the critical size limitation

Geometry-dependent Skin Effects in Reciprocal Photonic Crystals

Deep photonic network platform enabling arbitrary and broadband optical functionality

Nanophotonic waveguide chip-to-free-space beam scanning at 68 Million Spots/(s$\cdot$mm$^{2}$)

Two-dimensional non-Hermitian Skin Effect in a Synthetic Photonic Lattice

Deep Photonic Networks with Arbitrary and Broadband Functionality

Compact ultra-broadband light coupling on chip via nonadiabatic pumping

Molding the flow of light at deep sub-wavelength scale

Significant crosstalk reduction using all-dielectric CMOS-compatible metamaterials

Free-form micro-optics enabling ultra-broadband low-loss fiber-to-chip coupling

Deep-subwavelength Integrated Optoelectronics

Artificial Gauge Field Enabled Low-Crosstalk, Broadband, Half-Wavelength-pitched Waveguide Arrays