Abstract:Piezoelectric materials enable emerging self-powered wearable and implantable devices. The sol–gel technology with the lowest cost for large-scale production has shown its potential for producing high-quality PZT thin films. However, fabricating PZT films with a sufficient thickness for different application scenarios requires a long and repeated coating and heat-treatment process. The traditional solution-based method usually requires at least 20 coating cycles to fabricate 2 μm-thick PZT thin films. To save cost and improve fabrication efficiency, we develop a simplified thin-film fabrication method assisted by PZT powder. The new method can fabricate 2 μm-thick PZT films in a single step, one spin coating and annealing. Experiments indicate that the powder-based PZT thin films have porous structures and outstanding piezoelectric performances. The measured <i>d</i><sub>33</sub> of the powder-based PZT thin film is 47 pm/V. Both solution-based and powder-based PZT thin films show high flexibility and good fatigue resistance. Furthermore, we explore 2D mica as the substrate and achieve the transfer-free fabrication of flexible PZT thin-film nanogenerators that effectively simplify the complicated physical or chemical thin-film lift-off processes. The nanogenerator prototypes demonstrate the capability of accurately monitoring dynamic responses of flexible and soft human tissues.The Supporting Information is available free of charge at <a class="ext-link" href="/doi/10.1021/acsami.0c16973?goto=supporting-info">https://pubs.acs.org/doi/10.1021/acsami.0c16973</a>.Characteristic of the powder-based PZT thin film, properties of PZT films with three different weight percentage of powder, comparison of the piezoelectric outputs from bending–releasing mode of three different powder weight percentages of PZT films, optical microscopy images of the surface of the powder-based PENG, and basic properties of fluorophlogopite mica (<a class="ext-link" href="/doi/suppl/10.1021/acsami.0c16973/suppl_file/am0c16973_si_001.pdf">PDF</a>)Real-time human motion detection (<a class="ext-link" href="/doi/suppl/10.1021/acsami.0c16973/suppl_file/am0c16973_si_002.mp4">MP4</a>)This article has not yet been cited by other publications.

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