Abstract:In order to inspire the use of layered materials for the realization of nanophotonic structures, the dielectric response and nonlinear susceptibility of various van der Waals crystals is extracted. Nanoantennas from single and twisted stacks of multiple layered crystals are fabricated on SiO2 and gold substrates yielding Mie resonances leading to strong light‐matter coupling and high‐quality‐factor, hybrid Mie‐plasmon modes. Numerous optical phenomena and applications have been enabled by nanophotonic structures. Their current fabrication from high refractive index dielectrics, such as silicon (Si) or gallium phosphide (GaP), pose restricting fabrication challenges while metals, relying on plasmons and thus exhibiting high ohmic losses, limit the achievable applications. An emerging class of layered, so‐called van der Waals (vdW), crystals is presented as a viable nanophotonics platform in this work. The dielectric response of 11 mechanically exfoliated thin‐film (20–200 nm) vdW crystals is extracted, revealing high refractive indices up to n = 5, pronounced birefringence up to Δn = 3, sharp absorption resonances, and a range of transparency windows from ultraviolet to near‐infrared. Nanoantennas are subsequently fabricated on silicon dioxide (SiO2) and gold, utilizing the compatibility of vdW thin films with a variety of substrates. Pronounced Mie resonances are observed due to the high refractive index contrast on SiO2, leading to a strong exciton‐photon coupling regime as well as largely unexplored high‐quality‐factor, hybrid Mie‐plasmon modes on gold. Additional vdW‐material‐specific degrees of freedom in fabrication are further demonstrated by realizing nanoantennas from stacked twisted crystalline thin‐films, enabling control of nonlinear optical properties, and post‐fabrication nanostructure transfer, important for nano‐optics with sensitive materials.

High-precision local transfer of van der Waals materials on nanophotonic structures

On-Chip Integration of Optical Nanofibers and Nanowires

Pattern Transfer for Van Der Waals Integration

Van der Waals Materials for Applications in Nanophotonics

Laser-Driven Micro Transfer Placement of Prefabricated Microstructures

Double Etch Method for the Fabrication of Nanophotonic Devices from Van der Waals Materials

Demonstration of High-Performance, Sub-Micron Chalcogenide Glass Photonic Devices by Thermal Nanoimprint

Non-invasive digital etching of van der Waals semiconductors

High Quality Factor Microcavity for Van Der Waals Semiconductor Polaritons Using a Transferrable Mirror

Suspended dry pick-up and flip-over assembly for van der Waals heterostructures with ultra-clean surfaces

High-Fidelity Transfer of 2D Semiconductors and Electrodes for Van Der Waals Devices

Functionalizing nanophotonic structures with 2D van der Waals materials

Facile fabrication of 2D material multilayers and vdW heterostructures with multimodal microscopy and AFM characterization

Noninvasive Photodelamination of van der Waals Semiconductors for High-Performance Electronics

Transfer printing micro-assembly of silicon photonic crystal cavity arrays: beating the fabrication tolerance limit

Non‐Invasive Photodelamination of van der Waals Semiconductors for High‐Performance Electronics

Strategy for transferring van der Waals materials and heterostructures

Pick-and-place transfer of arbitrary-metal electrodes for van der Waals device fabrication

Etchant-free transfer of 2D nanostructures

Highly Accurate, Reliable and Non-Contaminating Two-Dimensional Material Transfer System