Abstract:Two-dimensional (2D) semiconductors have attracted considerable attention in recent years. However, to date, there is still no effective approach to produce large-scale monolayers while retaining their intrinsic properties. Here, we report a simple mechanical exfoliation method to produce large-scale and high-quality 2D semiconductors, by designing an atomically flat Au-mesh film as the peeling tape. Using our prefabricated mesh tape, the limited contact region (between the 2D crystal and Au) could provide enough adhesion to mechanically exfoliate uniform 2D monolayers, and the noncontact region (between the mesh holes and monolayers) ensures weak interaction to mechanically release the 2D monolayers on desired substrates. Together, we demonstrate a scalable method to dry exfoliate various 2D monolayer arrays onto different substrates without involving any solutions or contaminations, representing the optimization between material yield, scalability, and quality. Furthermore, detailed optical and electrical characterizations are conducted to confirm their intrinsic quality. With the ability to mechanically exfoliate various 2D arrays and further restacking them, we have demonstrated large-scale van der Waals heterostructure arrays through layer-to-layer assembling. Our study offers a simple and scalable method for dry exfoliating 2D monolayer and heterostructure arrays with intrinsic material quality, which could be crucial to accelerate fundamental investigations as well as practical applications of proof-of-concepts devices.The Supporting Information is available free of charge at https://pubs.acs.org/doi/10.1021/acsnano.1c05734.Photos of large-area monolayer MoS2; schematic illustration of reusing Au mesh tape for exfoliation; schematics and Raman mapping of exfoliated arrays with different square size; Raman mapping of exfoliated arrays; electrical characterizations of monolayer MoS2 arrays; PL and Raman spectra of monolayer WSe2 arrays, MoSe2 arrays, WS2 arrays; schematic illustration of WSe2/MoS2 heterojunction preparation process and its corresponding AFM measurement result; optical image and spectra of multilayer vdWH arrays; thickness measurement of PVA functionalization layer; dry exfoliation yield of substrate with or without functionalization layer (PDF)This article has not yet been cited by other publications.

Non‐Invasive Photodelamination of van der Waals Semiconductors for High‐Performance Electronics

Noninvasive Photodelamination of van der Waals Semiconductors for High-Performance Electronics

Controlled Growth of Atomically Thin In2se3 Flakes by Van Der Waals Epitaxy

Non-invasive digital etching of van der Waals semiconductors

High-Resolution Van der Waals Stencil Lithography for 2D Transistors

Highly reproducible van der Waals integration of two-dimensional electronics on the wafer scale

High-Fidelity Transfer of 2D Semiconductors and Electrodes for Van Der Waals Devices

Dry Exfoliation of Large-Area 2D Monolayer and Heterostructure Arrays

Wafer‐Scale Fabrication of Ultrathin Flexible Electronic Systems via Capillary‐Assisted Electrochemical Delamination

High-yield exfoliation of 2D semiconductor monolayers and reassembly of organic/inorganic artificial superlattices

Wafer level microarcing model in 90nm chemical-vapor deposition low-k via etch on 300mm silicon-on-insulator substrate

Facile damage-free double exposure for high-performance 2D semiconductor based transistors

Enhanced interlayer electron transfer by surface treatments in mixed-dimensional van der Waals semiconductor heterostructures

Wafer-scale high-κ dielectrics for two-dimensional circuits via van der Waals integration

Spatially-separated and photo-enhanced semiconductor corrosion processes for high-efficient and contamination-free electrochemical nanoimprint lithography

Residue-free Wafer-Scale Direct Imprinting of Two-Dimensional Materials

Unlocking High-Performance, Ultra-Low Power van der Waals Photo-Transistors: Toward Back-End-of-Line in-Sensor Machine Vision Applications

Exfoliation of 2D van der Waals crystals in ultrahigh vacuum for interface engineering

Two-Dimensional Van Der Waals Thin Film and Device

Van der Waals Epitaxial Growth of Ultrathin Indium Antimonide on Arbitrary Substrates Through Low‐thermal Budget