Abstract: Carbon nanotubes (CNTs) exhibit a great prospect as a nanoscale building block for future nanoelectronics due to their unique one-dimensional nanostructure and properties [1]. To explore their potential in various domains, an essential prerequisite is to build reliable interconnections between the CNTs and the external electrical circuits and mechanical systems. To address this need, various chemical and physical processes have been explored to build such interconnections. For example, Burghard et al. reported “controlled adsorption of CNTs on chemically modified electrodes” for interconnection of CNTs [2,3]. However, a stronger bonding instead of a weak chemical adsorption is mandatory for constructing reliable nanodevices. Ruoff et al. showed that focused electron beam in a scanning electron microscope (SEM) can be used to deposit a small amount of hydrocarbon contamination so as to attach nanotubes on an AFM tip [4, 5]. Such a “spot welding” technique has also been used for connecting CNTs and polysilicon surface electrically and mechanically [6]. Madsen et al. presented an in situ method for highly conductive attachment of multiwalled carbon nanotubes (MWCNTs) onto microelectrodes by depositing a gold–carbon composite using a focused electron beam system [7]. Although robust contacts can be obtained by the these methods, limited access to a focused electron beam system and the small-scale spot-treatment nature prevent their large-scale industrial applications. To meet the needs of future large-scale applications, simpler, less capital intensive and more scalable processes are highly desirable. In this chapter, we introduce a novel ultrasonic nanowelding process, with which one can fabricate reliable bonding between single-wall carbon nanotubes (SWCNTs) and metal electrodes. Contacts formed by the present process are found to have low contact resistance and good long-term stability and mechanical strength. A low resistance of around 15 k Ω for a 1- µm-long metallic SWCNT at room temperature can be achieved. After nanowelding, the effective Schottky barrier height between semiconducting SWCNT and Ti electrode is as low as ~6:6 meV in the ON-state and the barrier width is ~0:9 nm at Vg = 0. The performance of the CNT field-effect transistors (FETs) fabricated by this method has also been demonstrated to have greatly improved.

Robust Ohmic contact junctions between metallic tips and multiwalled carbon nanotubes for scanned probe microscopy

Establishing Ohmic contacts for in situ current-voltage characteristic measurements on a carbon nanotube inside the scanning electron microscope.

Mounting Multi-Walled Carbon Nanotubes on Probes by Dielectrophoresis

Electrochemical Preparation of STM Probes for High Aspect Ratio Nanometrology

Dual-MWCNT Probe Thermal Sensor Assembly and Evaluation Based on Nanorobotic Manipulation Inside a Field-Emission-Scanning Electron Microscope

Contact Characterization Between Multi-Walled Carbon Nanotubes And Metal Electrodes

Nanotubes as nanoprobes in scanning probe microscopy

Welding method for fabricating carbon nanotube probe

Local probing of the field emission stability of vertically aligned multiwalled carbon nanotubes

Establishing Ohmic Contact of a Radial Compressed CNT Bundle with High Work Function Metal

A platform for in-situ multi-probe electronic measurements and modification of nanodevices inside a transmission electron microscope.

Scanning Tunneling Microscopy Method For Electron Transport Measurement Of Individual Nanowires

Fabrication of Tungsten nanoprobes by Electrochemical etching: Role of cathode geometry and their use as electrical probe

Carbon Nanotube As Probe for Atomic Force Microscope

Measurement Of Mwcnt/Tungsten Contact Resistance By Bridging Cnt On Two Tungsten Electrodes With Two Manipulators

Characterization of Micro-Contact Resistance Between A Gold Nanocrystalline Line and A Tungsten Electrode Probe in Interconnect Fatigue Testing

Compliant Carbon Nanotube-Metal Contact Structures

Long-Lived Gold Single-Atom Junctions Formed by a Flexible Probe for Scanning Tunneling Microscopy Applications

Ultra High Thermal Resolution Scanning Probe Microscopy via Carbon Nanotube Tipped Thermal Probes

Study on the fabrication methods of carbon nanotube probe

Ultrasonic Nanowelding Technology Between Carbon Nanotubes and Metal Electrodes