Abstract:A highly efficient on-chip acousto-optic modulator is as a key component and occupies an exceptional position in microwave-to-optical conversion. Homogeneous thin-film lithium niobate is preferentially employed to build the suspended configuration for the acoustic resonant cavity, with the aim of improving the modulation efficiency of the device. However, the limited cavity length and complex fabrication recipe of the suspended prototype restrain further breakthroughs in modulation efficiency and impose challenges for waveguide fabrication. In this work, based on a nonsuspended thin-film lithium niobate-chalcogenide glass hybrid Mach–Zehnder interferometer waveguide platform, we propose and demonstrate a built-in push-pull acousto-optic modulator with a half-wave-voltage-length product V π L as low as 0.03 V cm that presents a modulation efficiency comparable to that of a state-of-the-art suspended counterpart. A microwave modulation link is demonstrated using our developed built-in push-pull acousto-optic modulator, which has the advantage of low power consumption. The nontrivial acousto-optic modulation performance benefits from the superior photoelastic property of the chalcogenide membrane and the completely bidirectional participation of the antisymmetric Rayleigh surface acoustic wave mode excited by the impedance-matched interdigital transducer, overcoming the issue of low modulation efficiency induced by the incoordinate energy attenuation of acoustic waves applied to the Mach–Zehnder interferometer with two arms in traditional push-pull acousto-optic modulators.

Ultra-compact acousto-optic modulation using on-chip integrated Bragg gratings on lithium niobate-chalcogenide hybrid platform

High-Performance Electro-Optic Modulator on Silicon Nitride Platform with Heterogeneous Integration of Lithium Niobate

Electro‐Optic Modulators: On‐Chip Dual Electro‐Optic and Optoelectric Modulation Based on ZnO Nanowire‐Coated Photonic Crystal Nanocavity (advanced Optical Materials 17/2018)

High Efficiency Single-Sideband Modulator Using Coupled Bragg Grating Resonators on Thin-Film Lithium Niobate

Highly efficient acousto-optic modulation using nonsuspended thin-film lithium niobate-chalcogenide hybrid waveguides

Cavity-enhanced acousto-optic modulators on polymer-loaded lithium niobate integrated platform

On-chip 7 GHz acousto-optic modulators for visible wavelengths

Hybrid thin-film lithium niobate micro-ring acousto-optic modulator for microwave-to-optical conversion

Ultra-high Efficiency Electro-optic Modulator on Thin-film Lithium Niobate

Silicon-lattice-matched boron-doped gallium phosphide: A scalable acousto-optic platform

Progress of Thin-Film Lithium Niobate Acousto-Optic Modulators(Invited)

Electro-optic tunable Bragg grating filters on hybrid silicon and lithium niobate thin films

High-efficiency hybrid amorphous silicon grating couplers for sub-micron-sized lithium niobate waveguides.

High-efficiency Electro-Optic Modulators in Lithium Niobate on Insulator

Ultra-compact Thin Film Lithium Niobate Electro-optic Modulator with Metal-filled Photonic Crystal Waveguide

Ultracompact Electrooptic Silicon Modulator With Horizontal Photonic Crystal Slotted Slab

Integrated electro-optic modulator on a lead zirconate titanate-silicon nitride heterogeneous platform

Ultra-compact Electro-Optic Modulator Based on Etchless Lithium Niobate Photonic Crystal Nanobeam Cavity.

Integrated waveguide-based acousto-optic modulation with near-unity conversion efficiency

Numerical analysis of on-chip acousto-optic modulators for visible wavelengths

Demonstration of On-Chip Gigahertz Acousto-Optic Modulation at Near-Visible Wavelengths