Abstract:Integrated photonic circuits have transformed data communication, biosensing, and light detection and ranging, and hold wide-ranging potential for optical computing, optical imaging and signal processing. These applications often require tunable and reconfigurable photonic components, most commonly accomplished through the thermo-optic effect. However, the resulting tuning window is limited for standard optical materials such as silicon dioxide and silicon nitride. Most importantly, bidirectional thermal tuning on a single platform has not been realized. For the first time, we show that by tuning and optimizing the deposition conditions in inductively-coupled plasma chemical vapor deposition (ICPCVD) of silicon dioxide, this material can be used to deterministically tune the thermo-optic properties of optical devices without introducing significant losses. We demonstrate that we can deterministically integrate positive and negative wavelength shifts on a single chip, validated on amorphous silicon carbide (a-SiC), silicon nitride (SiN) and silicon-on-insulator (SOI) platforms. We observe up to a 10-fold improvement of the thermo-optic tunability and, in addition, demonstrate athermal ring resonators with shifts as low as 1.5 pm/°C. This enables the fabrication of a novel tunable coupled ring optical waveguide (CROW) requiring only a single heater. In addition, the low-temperature deposition of our silicon dioxide cladding can be combined with lift-off to isolate the optical devices resulting in a decrease in thermal crosstalk by at least two orders of magnitude. Our method paves the way for novel photonic architectures incorporating bidirectional thermo-optic tunability.

Thermally tunable hybrid photonic architecture for nonlinear optical circuits

Silicon Coupled Cavities As a Flexible Platform for Integrated Nonlinear Photonics

A hybrid chalcogenide-on-silicon platform for nonlinear photonics

Wavelength stability in a hybrid photonic crystal laser through controlled nonlinear absorptive heating in the reflector

Adjusting Third-Order Nonlinear Properties in Silicon Triply Resonant Nanobeam Cavities

Nonlinear Third Order Silicon Photonics Enabled by Dispersion and Subwavelength Engineering

Photonic-integrated circuits and components using quantum well intermixing

AlGaN/AlN heterostructures: an emerging platform for nonlinear integrated photonics

Photonic Integrated Circuits and Components Using Quantum Well Intermixing

Integrated GaN photonic circuits on silicon (100) for second harmonic generation

Magic silicon dioxide for widely tunable integrated photonics

Tunable V-Cavity Lasers Integrated with a Cyclic Echelle Grating for Distributed Routing Networks

All-optical thermal control for second-harmonic generation in an integrated microcavity

Non-volatile Tuning of Cryogenic Optical Resonators

All-Optical Switching of Silicon Nanobeam Cavities with an Ultra-compact Heater Utilizing the Photothermal Effect

Deterministic integrated tuning of multi-cavity resonances and phase for slow-light in coupled photonic crystal cavities

Nonlinear Optics: Heterogeneously Integrated GaAs Waveguides on Insulator for Efficient Frequency Conversion (Laser Photonics Rev. 12(10)/2018)

Thermally Tunable Silicon Photonic Microdisk Resonator with Transparent Graphene Nanoheaters

Fabrication of GaN/AlGaN 1D photonic crystals designed for nonlinear optical applications

Heterogeneously Integrated GaAs Waveguides on Insulator for Efficient Frequency Conversion