Enhancing the photon-extraction efficiency of site-controlled quantum dots by deterministically fabricated microlenses

Arsenty Kaganskiy,Sarah Fischbach,Andre Strittmatter,Tobias Heindel,Sven Rodt,Stephan Reitzenstein

DOI: https://doi.org/10.1016/j.optcom.2017.12.032

2017-12-13

Abstract:We report on the realization of scalable single-photon sources (SPSs) based on single site-controlled quantum dots (SCQDs) and deterministically fabricated microlenses. The fabrication process comprises the buried-stressor growth technique complemented with low-temperature in-situ electron-beam lithography for the integration of SCQDs into microlens structures with high yield and high alignment accuracy. The microlens-approach leads to a broadband enhancement of the photon-extraction efficiency of up to (21 $\pm$ 2) $\%$ and a high suppression of multi-photon events with g$^{(2)}$($\tau$ = 0) $<$ 0.06 without background subtraction. The demonstrated combination of site-controlled growth of QDs and in-situ electron-beam lithography is relevant for arrays of efficient SPSs which can be applied in photonic quantum circuits and advanced quantum computation schemes.

Mesoscale and Nanoscale Physics

What problem does this paper attempt to address?

The main problem that this paper attempts to solve is to improve the photon extraction efficiency of single - photon sources (SPSs), especially single - photon sources based on site - controlled quantum dots (SCQDs). Specifically, the authors enhance the photon extraction efficiency of SCQDs by deterministically fabricating microlenses and suppress the occurrence of multi - photon events. The following are the key problems and solutions proposed in the paper:

### Main problems:
1. **Low photon extraction efficiency**: Traditional self - assembled quantum dots (QDs) are difficult to be efficiently integrated into photonic structures due to the randomness of their positions and the uncertainty of their emission energies, resulting in low photon extraction efficiency.
2. **Insufficient suppression of multi - photon events**: When implementing a single - photon source, it is necessary to minimize the occurrence of multi - photon events as much as possible to ensure the quality of the single - photon source.

### Solutions:
1. **Growth of site - controlled quantum dots (SCQDs)**: Through the buried - stressor growth technique, the growth of quantum dots can be precisely controlled at specific positions, thus avoiding the position randomness problem of traditional self - assembled quantum dots.
2. **In - situ electron - beam lithography (EBL)**: Using low - temperature in - situ electron - beam lithography technology, SCQDs can be integrated into the microlens structure with high precision, ensuring alignment accuracy and high yield.
3. **Optimized design of microlenses**: By numerically optimizing the height and radius of the microlenses, the broadband photon extraction efficiency is maximized. Specifically, the simulation results show that when the microlens height is 418 nm and the radius is 1040 nm, the photon extraction efficiency reaches 26.6%.

### Experimental results:
- **Photon extraction efficiency**: The photon extraction efficiency measured in the experiment is \((21\pm2)\%\), which is close to the maximum value calculated theoretically.
- **Suppression of multi - photon events**: The suppression effect of multi - photon events is verified by photon auto - correlation measurement, and \(g^{(2)}(\tau = 0)<0.06\) is measured, indicating that the quality of the single - photon source is very high.

### Application prospects:
This technology combining site - controlled quantum dots and microlenses can be applied to photonic quantum circuits and advanced quantum computing schemes, providing the possibility for realizing large - scale parallel optical links.

In summary, through the innovative microlens manufacturing technology and the growth method of site - controlled quantum dots, this paper significantly improves the photon extraction efficiency of single - photon sources and effectively suppresses multi - photon events, laying the foundation for the development of the quantum communication and quantum computing fields.