Abstract:Despite the superiority in quantum properties, self-assembled semiconductor quantum dots face challenges in terms of scalable device integration because of their random growth positions, originating from the Stranski-Krastanov growth mode. Even with existing site-controlled growth techniques, for example, nanohole or buried stressor concepts, a further lithography and etching step with high spatial alignment requirements isnecessary to accurately integrate QDs into the nanophotonic devices. Here, we report on the fabrication and characterization of strain-induced site-controlled microcavities where site-controlled quantum dots are positioned at the antinode of the optical mode field in a self-aligned manner without the need of any further nano-processing. We show that the Q-factor, mode volume, height, and the ellipticity of site-controlled microcavities can be tailored by the size of an integrated AlAs/Al2O3 buried stressor, with an opening ranging from 1 to 4 $\mu$m. Lasing signatures, including super-linear input-output response, linewidth narrowing near threshold, and gain competition above threshold, are observed for a 3.6-$\mu$m self-aligned cavity with a Q-factor of 18000. Furthermore, by waiving the rather complex lateral nano-structuring usually performed during the fabrication process of micropillar lasers and vertical-cavity surface emitting lasers, quasi-planar site-controlled cavities exhibit no detrimental effects of excitation power induced heating and thermal rollover. Our straightforward deterministic nanofabrication concept of high-quality quantum dot microcavities integrates seamlessly with the industrial-matured manufacturing process and the buried-stressor techniques, paving the way for exceptional scalability and straightforward manufacturing of high-\b{eta} microlasers and bright quantum light sources.

Resonance fluorescence of a site-controlled quantum dot realized by the buried-stressor growth technique

Tuning Quantum Dot States with Optical Fields

Epitaxial growth and characterization of multi-layer site-controlled InGaAs quantum dots based on the buried stressor method

Observation of Resonance Fluorescence and the Mollow-triplet from a Coherently Driven Site-Controlled Quantum Dot

Self-aligned photonic defect microcavities with site-controlled quantum dots

Strain Spectrally-Tunable Single-Photon Source Based on a Quantum Dot in Microcavity (conference Presentation)

Resonance fluorescence revival in a voltage-controlled semiconductor quantum dot

Resonance fluorescence from a coherently driven semiconductor quantum dot in a cavity

Highly Indistinguishable On-Demand Resonance Fluorescence Photons from a Deterministic Quantum Dot Micropillar Device with 74% Extraction Efficiency.

Enhancing the photon-extraction efficiency of site-controlled quantum dots by deterministically fabricated microlenses

Control of Quantized Spontaneous Emission from Single GaAs Quantum Dots Embedded in Huygens' Metasurfaces

Exciton complexes and quantum electrodynamics of highly-symmetric single-site-controlled InGaAS quantum dot nanocavities

A quantum dot coupled to a suspended-beam mechanical resonator: from the unresolved- to the resolved-sideband regime

Fine-tunable near-critical Stranski-Krastanov growth of InAs/InP quantum dots

Resonance Fluorescence from an Atomic-Quantum-memory Compatible Single Photon Source Based on GaAs Droplet Quantum Dots

Controlled Coherent Coupling in a Quantum Dot Molecule Revealed by Ultrafast Four-Wave Mixing Spectroscopy

On demand single photon generation and coherent control of excitons from resonantly driven nanowire quantum dots

Single quantum dot selection and tailor-made photonic device integration using nanoscale focus pinspot

Quantum dot coupled to a suspended-beam mechanical resonator: From the unresolved- to the resolved-sideband regime

A novel site-controlled quantum dot system with high uniformity and narrow excitonic emission