Flexible Hall Sensors Based on Graphene

Zhenxing Wang,Mehrdad Shaygan,Martin Otto,Daniel Schall,Daniel Neumaier

DOI: https://doi.org/10.1039/c5nr08729e

2017-07-27

Abstract:The excellent electronic and mechanical properties of graphene provide a perfect basis for high performance flexible electronic and sensor devices. Here, we present the fabrication and characterization of flexible graphene based Hall sensors. The Hall sensors are fabricated on 50 um thick flexible Kapton foil using large scale graphene grown by chemical vapor deposition technique on copper foil. Voltage and current normalized sensitivities of up to 0.096 V/VT and 79 V/AT were measured, respectively. These values are comparable to the sensitivity of rigid silicon based Hall sensors and are the highest values reported so far for any flexible Hall sensor devices. The sensitivity of the Hall sensor shows no degradation after being bent to a minimum radius of 4 mm, which corresponds to a tensile strain of 0.6%, and after 1,000 bending cycles to a radius of 5 mm.

Applied Physics,Mesoscale and Nanoscale Physics

What problem does this paper attempt to address?

The problem that this paper attempts to solve is to develop a graphene - based flexible Hall sensor to achieve a magnetic sensor with high performance, high sensitivity and good flexibility. Specifically, the paper aims to:

1. **Improve the sensitivity of the flexible Hall sensor**: Silicon - based CMOS Hall sensors used in most current applications have high sensitivity but lack flexibility. Although existing flexible Hall sensors have good flexibility, their sensitivity is far lower than that of silicon - based sensors. Therefore, researchers hope to use graphene to manufacture flexible Hall sensors so that their sensitivity can be comparable to or even exceed that of existing flexible sensors.

2. **Verify the advantages of graphene in flexible electronic devices**: Graphene has excellent electrical and mechanical properties, such as high carrier mobility and low surface carrier density, which make it an ideal material for manufacturing high - performance flexible electronics and sensing devices. The paper verifies the application potential of graphene in flexible Hall sensors through experiments.

3. **Ensure the stability and durability of the sensor under bending conditions**: In order to make the sensor suitable for application scenarios such as wearable electronic devices and electronic skin, researchers need to ensure that the sensor can maintain its performance unchanged after being bent multiple times. The paper shows that the sensitivity of the prepared graphene - based flexible Hall sensor does not decrease significantly after 1,000 bending cycles.

### Main achievements

- **High sensitivity**: The voltage - normalized sensitivity of the prepared flexible graphene - based Hall sensor reaches 0.096 V/VT, and the current - normalized sensitivity reaches 79 V/AT, which is comparable to that of rigid silicon - based Hall sensors and significantly better than other reported flexible Hall sensors.

\[
S_V=\frac{1}{V_C}\left|\frac{\partial V_H}{\partial B}\right|
\]

\[
S_I = \frac{1}{I_C}\left|\frac{\partial V_H}{\partial B}\right|
\]

- **Excellent flexibility**: The performance of the sensor does not degrade when it is bent to a minimum radius of 4 mm (corresponding to 0.6% tensile strain) and after 1,000 bending cycles.

- **Potential applications**: This new type of flexible Hall sensor is expected to be applied in fields such as biomedicine, wearable electronic devices and electronic skin, especially in cases where precise position detection or current monitoring is required.

In conclusion, by introducing graphene as a key material, this paper successfully solves the problem of insufficient sensitivity of existing flexible Hall sensors and shows its great potential in practical applications.