Wafer-scale flexible graphene strain sensors

He Tian,Yi Yang,Dan Xie,Yi Shu,Yalong Cui,Can Wu,Hualin Cai,Tianling Ren
DOI: https://doi.org/10.1109/IEDM.2013.6724632
2013-01-01
Abstract:In this paper, wafer-scale flexible strain sensors with high-performance are fabricated in one-step laser scribing. The graphene films could be obtained by direct reducing graphene oxide film in a light-scribe DVD burner. Our graphene strain sensor has the gauge factor (GF) of 0.11. In order to enhance the GF further, the graphene micro-ribbon has been used as strain sensor, which has the GF up to 9.49, which is higher than most of the reported that of graphene strain sensors (0.55~6.1). Our devices can meet the needs of specific applications, for example, high GF for low-strain applications and low GF for high deformation applications. Our work indicates that laser scribed flexible graphene strain sensors could be widely used for medical-sensing, bio-sensing, artificial skin and many other areas.
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