Optical colorimetric LiTaO_3 wafers for high-precision lithography on frequency control of SAW devices
Ming Hui Fang,Yinong Xie,Fangqi Xue,Zhilin Wu,Jun Shi,Sheng Yu Yang,Yilin Liu,Zhihuang Liu,Hsin Chi Wang,Fajun Li,Qing Huo Liu,Jinfeng Zhu
DOI: https://doi.org/10.1364/prj.499795
IF: 7.6
2024-02-03
Photonics Research
Abstract:Ming Hui Fang, Yinong Xie, Fangqi Xue, Zhilin Wu, Jun Shi, Sheng Yu Yang, Yilin Liu, Zhihuang Liu, Hsin Chi Wang, Fajun Li, Qing Huo Liu, Jinfeng Zhu Surface acoustic wave (SAW) resonators based on lithium tantalate (LT, LiTaO_3) wafers are crucial elements of mobile communication ... [Photon. Res. 12, 341-349 (2024)]
optics