Corrigendum: "Reliability of piezoelectric films for MEMS" [Jpn. J. Appl. Phys. 62, SM0802 ]

Susan Trolier-McKinstry,Wanlin Zhu,Betul Akkopru-Akgun,Fan He,Song Won Ko,Charalampos Fragkiadakis,Peter Mardilovich
DOI: https://doi.org/10.35848/1347-4065/ad17df
IF: 1.5
2024-01-20
Japanese Journal of Applied Physics
Abstract:The numerical values in the last column in Table I should be corrected as follows. The reason for the correction is an authors' error in writing. For additional clarity, the range of E B values measured are included. Table I. Comparison of gradient and gradient free PZT films. ε r is relative permittivity, P r is remanent polarization, E C is coercive field, E i is imprint and E B is electrical breakdown field. The imprint was measured after poling either field up or field down at 200 kV cm −1 for 30 min at 150 °C. The polarization measurements were performed by driving the bottom electrode and the observed positive shift of the polarization loop indicated an initial field down imprint in both films, albeit more pronounced in the gradient free case. This correction does not affect any other part of the article.
physics, applied
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