Stabilizing shallow color centers in diamond created by nitrogen delta-doping using SF$_6$ plasma treatment

Christian Osterkamp,Johannes Lang,Jochen Scharpf,Christoph Müller Liam Paul McGuinness,Thomas Diemant,R. J. Behm,Boris Naydenov,Fedor Jelezko
DOI: https://doi.org/10.1063/1.4915305
2015-03-23
Abstract:Here we report the fabrication of stable, shallow (< 5 nm) nitrogen-vacancy (NV) centers in diamond by nitrogen delta doping at the last stage of the chemical vapor deposition (CVD) growth process. The NVs are stabilized after treating the diamond in $SF_6$ plasma, otherwise the color centers are not observed, suggesting a strong influence from the surface. X-Ray photoelectron spectroscopy measurements show the presence of only fluorine atoms on the surface, in contrast to previous studies, and suggests very good surface coverage. We managed to detect hydrogen nuclear magnetic resonance signal from protons in the immersion oil, revealing a depth of the NVs of about 5 nm
Mesoscale and Nanoscale Physics,Quantum Physics
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